2007
DOI: 10.1016/j.jcrysgro.2006.11.006
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AlN growth on sapphire substrate by ammonia MBE

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Cited by 32 publications
(24 citation statements)
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“…AlN films were grown on sapphire or Si substrates by metal organic chemical vapor deposition (MOCVD) [17] or MBE [18] at a temperature more than 800 1C. At high temperatures, a serious interfacial reaction was inevitable, which made it very difficult to fabricate pure cubic phase AlN films.…”
Section: Introductionmentioning
confidence: 99%
“…AlN films were grown on sapphire or Si substrates by metal organic chemical vapor deposition (MOCVD) [17] or MBE [18] at a temperature more than 800 1C. At high temperatures, a serious interfacial reaction was inevitable, which made it very difficult to fabricate pure cubic phase AlN films.…”
Section: Introductionmentioning
confidence: 99%
“…10 cm -2 [10] most of the QDs in the samples with high GaN coverage are dislocation free. PL spectra presented in Fig.1 evidence that the size distribution of QDs in the sample #417 is close to that in the sample #415.…”
Section: Discussionmentioning
confidence: 95%
“…The nitridation is intuitively understood by structural and chemical changes caused by nitrogen on a-Al 2 O 3 surfaces. Several experimental studies have reported that AlN layers are formed on a a-Al 2 O 3 (0001) surface by exposing ammonia (NH 3 ) [1,2], N-radical [3] or N 2 -plasma [4,5] in molecular beam epitaxy as well as in metal-organic vapor phase epitaxy (MOVPE) [6,7] and hydride vapor phase epitaxy [8]. In contrast to these findings, Uchida et al have found that amorphous AlN x O 1 À x layer is formed on a a-Al 2 O 3 (0001) surface by heating at 1050 1C in NH 3 ambient conditions in the MOVPE [9].…”
Section: Introductionmentioning
confidence: 99%