Alternate novolak resin fractionation

Abstract

Novolak resins fractionated using a unique method, were compared to resins fractionated with conventional methods. The potential for improving the fractionation/separation process and for making improved or more consistent resists with the resins was identified. Several experimental designs were run to determine optimum conditions needed to achieve better separation. Isolated resins were used to make experimental i-line photoresists which were tested against resists made with the conventional processes. This paper will discuss the experimental process design and the performance characteristics of the fractionated resins in experimental i-line photoresist formulations.