2010
DOI: 10.1088/0953-2048/24/3/035005
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Aluminum hard mask technique for the fabrication of high quality submicron Nb/Al–AlOx/Nb Josephson junctions

Abstract: We have developed a combined photolithography and electron-beam lithography fabrication process for sub-μm to μm-size Nb/Al-AlO x /Nb Josephson junctions. In order to define the junction size and protect its top electrode during anodic oxidation, we developed and used the new concept of an aluminum hard mask. Josephson junctions of sizes down to 0.5 μm 2 have been fabricated and thoroughly characterized. We found that they have a very high quality, which is witnessed by the I V curves with quality parameters V… Show more

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Cited by 15 publications
(12 citation statements)
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“…There are two experimental reported results, one for a single phase qubit of T 2 B21 ns (ref. 26), and another for a flux qubit of T 2 B500 ns (ref. 33).…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…There are two experimental reported results, one for a single phase qubit of T 2 B21 ns (ref. 26), and another for a flux qubit of T 2 B500 ns (ref. 33).…”
Section: Discussionmentioning
confidence: 99%
“…An implementation of open system QA has recently been reported in a programmable architecture of superconducting flux qubits [20][21][22][23] , and applied to relatively simple protein folding and number theory problems 24,25 . Although quantum tunnelling has already been demonstrated 23 , the decoherence time in this architecture can be three orders of magnitude faster than the computational timescale 23,26 , due in part to the constraints imposed by the scalable design. It is interesting to note that this decoherence is in the instantaneous energy eigenbasis (see below).…”
mentioning
confidence: 99%
“…Nb is compatible with industrial level processing [19], its chemical stability yields lower wet etch rates and better etch selectivity towards oxides [12]. Nb is also used to fabricate wafer-scale trilayer Josephson junctions [13]- [15], making it an attractive candidate for large-scale superconducting device integration. Despite favorable physical and electrical properties, Nb forms 5-7 nm of native oxide, consisting of three components: NbO, NbO2, Nb2O5 [20], [21].…”
Section: Introductionmentioning
confidence: 99%
“…For such flux qubits, the T 2 time can at present range from tens of nanoseconds to a few hundred nanoseconds [21,22], yet the computation lasts on the order of microseconds to milliseconds. If the qubits have all decohered long before the computation is over, how can this be reconciled with evidence that the D-Wave devices perform quantum annealing [23][24][25][26][27][28][29][30][31][32]?…”
Section: Introductionmentioning
confidence: 99%