Aluminum nitride nanophotonic circuits operating at ultraviolet wavelengths

Stegmaier, Matthias; Ebert, Johanes; Meckbach, J.M.; Ilin, K.; Siegel, M.; Pernice, Wolfram

doi:10.1063/1.4867529

Cited by 45 publications

(33 citation statements)

References 24 publications

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“…Each transmission peak corresponds to an individual measurement of a different device. The transmission decreases for smaller wavelengths, which can be mainly attributed to the increasing propagation losses at small wavelengths [41].Due to the efficient polishing of our diamond thin films, the propagation losses are reduced compared to previous work (see Supplementary Fig. S6 and S7), showing the potential of the material used in this work.…”

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confidence: 46%

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Diamond Nanophotonic Circuits Functionalized by Dip‐pen Nanolithography

Rath

Hirtz

Lewes-Malandrakis

et al. 2014

Advanced Optical Materials

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Integrated nanophotonic circuits made from wide-bandgap semiconductors offer exciting prospects for advanced sensing applications and broadband optical data processing. Among the available substrates, diamond is particularly appealing due to its long-term stability, biocompatibility and chemical inertness. Because of strong field confinement in diamond waveguides, near-field effects can be efficiently harnessed to realize building blocks for biofunctional circuits in a scalable fashion. Here, we report on the parallel and site-specific functionalization of diamond nanophotonic devices as a promising route towards waferscale bio-photonic systems. We show that arbitrary geometric features can be surface modified using dip-pen nanolithography with a minimum linewidth of 100 nm. We simultaneously functionalize several microring and microdisc resonators with different dies and high precision, allowing us to route fluorescent emission with photonic waveguides to arbitrary locations on chip. Our approach holds promise for hybrid optical systems and nanoscale bioactive devices for robust biomedical and environmental high-throughput sensing applications.2 Photonic components made from diamond have emerged as a promising platform for applications in quantum optics [1][2][3][4], non-linear optics [5,6] and optomechanics [7,8].Because of its remarkable material properties such as broadband optical transparency, high mechanical stability and hardness, high thermal conductivity, and good chemical stability, diamond is used for a wealth of applications in research and industrial environments. In particular the combination of appealing optical properties and biocompatibility make diamond an attractive platform for biophotonic applications [9][10][11]. Nowadays high quality diamond thin films are available on large-scale substrates by relying chemical vapor deposition (CVD) which allows for using waferscale processing techniques to realize functional devices. In this way homogeneous large scale diamond thin films can be achieved (see Supplementary Fig. S2). Using nanofabrication routines developed originally for the electronics industry CVD diamond thin films can be structured into subwavelength photonic devices, which allow for propagating light over centimeter distances, the realization of high quality optical resonators and on-chip interferometers [8,12]. This way the powerful toolbox available to integrated optics can be efficiently utilized to realize a sensitive readout platform for biological signals.In order to employ integrated photonic devices for biosensing suitable links to desired analytes have to be established. Several techniques are commonly employed to functionalize pre-structured photonic substrates, including spincoating with suitable coatings introduced in the liquid phase [13,14] and exposure to reactive agents in the gas phase [15]. While such techniques are suitable to functionalize many photonic components uniformly, it is ultimately necessary to only target specific locations on chip. Deposition of ...

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confidence: 46%

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confidence: 99%

Diamond Nanophotonic Circuits Functionalized by Dip‐pen Nanolithography

Rath

Hirtz

Lewes-Malandrakis

et al. 2014

Advanced Optical Materials

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“…The nitride semiconductor materials are considered as the most appropriate materials for short wavelength and ultra-violet nanophotonics. [1][2][3] More recently, there has been an increased interest for using nitrides like gallium nitride or aluminum nitride in the near-infrared at telecom wavelengths. As opposed to silicon which is centrosymmetric, the nitride semiconductors exhibit a non-vanishing second-order nonlinear susceptibility 4 which can be used for second-order nonlinear processes (harmonic generation, frequency conversion).…”

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Near-infrared gallium nitride two-dimensional photonic crystal platform on silicon

Roland

Zeng

Han

et al. 2014

Applied Physics Letters

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International audienceWe demonstrate a two-dimensional free-standing gallium nitride photonic crystal platform operating around 1550 nm and fabricated on a silicon substrate. Width-modulated waveguide cavities are integrated and exhibit loaded quality factors up to 34 000 at 1575 nm. We show the resonance tunability by varying the ratio of air hole radius to periodicity, and cavity hole displacement. We deduce a 7.9 dB/cm linear absorption loss for the suspended nitride structure from the power dependence of the cavity in-plane transmission

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“…Imagem da vista da seção traversal do guia fabricado em (Xiong et al, 2012) Fonte: (Xiong et al, 2012) Vale a pena ressaltar que o fato do AlN ter um bandgap amplo (Eg = 5,9-6,2 eV), faz com que ele fique transparente não só na região do infravermelho e na do visível, mas também no ultravioleta, ampliando a possibilidade de aplicações, como pode ser visto no trabalho (Stegmaier et al, 2014). (Stegmaier et al, 2014).…”

Section: Guias De Onda Utilizando Alnunclassified

“…Fonte: (Stegmaier et al, 2014) Pode-se perceber a partir dos trabalhos apresentados que em todos os casos (independente do comprimento de onda trabalhado) foi necessário realizar uma corrosão para a definição das paredes laterais do guia de onda.…”

Section: Guias De Onda Utilizando Alnunclassified

Produção e caracterização de filmes de nitreto de alumínio e sua aplicação em guias de onda tipo pedestal.

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Elisia²

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Aluminum nitride nanophotonic circuits operating at ultraviolet wavelengths

Cited by 45 publications

References 24 publications

Diamond Nanophotonic Circuits Functionalized by Dip‐pen Nanolithography

Diamond Nanophotonic Circuits Functionalized by Dip‐pen Nanolithography

Near-infrared gallium nitride two-dimensional photonic crystal platform on silicon

Produção e caracterização de filmes de nitreto de alumínio e sua aplicação em guias de onda tipo pedestal.

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