Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays for Non-Invasive Monitoring of Radial Artery Stiffness

Abstract

An aluminum nitride (AlN) piezoelectric micromachined ultrasound transducer (PMUT) array was proposed and fabricated for non-invasive radial artery stiffness monitoring, which could be employed in human vascular health monitoring applications. Using surface micromachining techniques, four hexagonal PMUT arrays were fabricated within a chip area of 3 × 3 mm2. The mechanical displacement sensitivity and quality factor of a single PMUT were tested and found to be 24.47 nm/V at 5.94 MHz and 278 (in air), respectively. Underwater pulse-echo tests for the array demonstrated a −3 dB bandwidth of 0.76 MHz at 3.75 MHz and distance detection limit of approximately 25 mm. Using the PMUT array as an ultrasonic probe, the depth and diameter changes over cardiac cycles of the radial artery were measured to be approximately 3.8 mm and 0.23 mm, respectively. Combined with blood pressure calibration, the biomechanical parameters of the radial artery vessel were extracted using a one-dimensional vascular model. The cross-sectional distensibility, compliance, and stiffness index were determined to be 4.03 × 10−3/mmHg, 1.87 × 10−2 mm2/mmHg, and 5.25, respectively, consistent with the newest medical research. The continuous beat-to-beat blood pressure was also estimated using this model. This work demonstrated the potential of miniaturized PMUT devices for human vascular medical ultrasound applications.

Design and micromanufacturing technologies of focused piezoelectric ultrasound transducers for biomedical applications

“…This work significantly enhances the sensors' sensitivity and resolution. In addition to conventional ferroelectric thin films, ZnO [73] and AlN [74], which are commonly used in semiconductors, can also be used as active materials for focused ultrasound transducers. While ZnO and AlN offer superior consistency and reliability for semiconductor applications, their piezoelectric performance is not as strong as that of traditional PZT-based films.…”