Ambient AFM Nanoscale Oxidation of Hydrogen‐Passivated Silicon with Conductive‐Diamond‐Coated Probes

Scanning probe anodization patterning of Si substrates covered with a self-assembled monolayer dependent on surface hydrophilicity

“…As shown in Figs. There are two plausible explanations: the CDT surface has a hydrophobic nature 30 and hydrogen evolution ͑2H+2e → H 2 ͒ as a cathode reaction on the boron-doped diamond surface is slow. Similarly, it has been reported that fine oxide patterns were fabricated in ambient air with a carbon nanotube tip, which is expected to be relatively hydrophobic as well.…”

Conductive Atomic Force Microscope Nanopatterning of Epitaxial Graphene on SiC(0001) in Ambient Conditions

“…[ 26-28 , 30 , 31 ] Furthermore, the nanopattern lateral size is observed to increase with increasing relative humidity (see Figure S2, Supporting Information), which has been widely observed in previous studies of AFM local anodic oxidation and most commonly attributed to the increasing size of the water meniscus at the tip-sample junction at elevated humidity. [11][12][13] The kinetics and chemistry (indicated by HF etching) of the cAFM nanopatterns on EG/SiC also share qualitative similarities to local anodic oxidation on other substrates such as silicon. [11][12][13] While local anodic oxidation is the likely overarching mechanism, a closer inspection reveals many unique features of cAFM nanopatterning on EG/SiC.…”

“…[11][12][13] The kinetics and chemistry (indicated by HF etching) of the cAFM nanopatterns on EG/SiC also share qualitative similarities to local anodic oxidation on other substrates such as silicon. [11][12][13] While local anodic oxidation is the likely overarching mechanism, a closer inspection reveals many unique features of cAFM nanopatterning on EG/SiC. For example, in Figure 1 b , the dots nanopatterned at biases above 7 V show anisotropic structure laterally even though the surface was fully graphitized in this case.…”

Conductive Scanning Probe Characterization and Nanopatterning of Electronic and Energy Materials

“…The application of a negative bias to the cAFM tip will then drive anodic oxidation of the sample . This technique, called field-induced oxidation (FIO), has been employed on Si and metals to create nanopatterned regions of surface oxide. − …”