2003
DOI: 10.1016/s0038-1098(02)00849-9
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Amorphous silicon thin-film negative electrode prepared by low pressure chemical vapor deposition for lithium-ion batteries

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Cited by 109 publications
(56 citation statements)
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“…Thin-film amorphous silicon anodes were fabricated by low pressure chemical vapor deposition (LPCVD) using Si2H6 as a source gas by Jung and coworkers. 85 The prepared sample exhibited the very high reversible capacity of 4000 mAh g -1 , which is about 95% of the theoretical capacity of silicon. Unfortunately, the capacity fade was rapid after only 40…”
Section: Si2h6mentioning
confidence: 89%
“…Thin-film amorphous silicon anodes were fabricated by low pressure chemical vapor deposition (LPCVD) using Si2H6 as a source gas by Jung and coworkers. 85 The prepared sample exhibited the very high reversible capacity of 4000 mAh g -1 , which is about 95% of the theoretical capacity of silicon. Unfortunately, the capacity fade was rapid after only 40…”
Section: Si2h6mentioning
confidence: 89%
“…The obtained thin film anode showed severe capacity degradation after three cycles, resulting from the crack and loss of active material during volume change related to the large thickness of the film [116]. A low-pressure chemical vapor deposition (LPCVD) involved synthesis was introduced by Jung et al In their work, amorphous silicon thin film with a thickness of 50 nm was fabricated by using disilane through LPCVD [117]. The obtained structure achieved an initial capacity of 4000 mAh/g and an enhanced cyclability over 1500 cycles at 400 mAh/g.…”
Section: Physical Synthesis Of Silicon Thinmentioning
confidence: 99%
“…The obtained structure achieved an initial capacity of 4000 mAh/g and an enhanced cyclability over 1500 cycles at 400 mAh/g. Moreover, the structure was also tested as full cell with LiMn 2 O 4 anode, showing an output voltage of 3.0-3.8 V and a cyclability of 400 cycles [117].…”
Section: Physical Synthesis Of Silicon Thinmentioning
confidence: 99%
“…Recently, various oxides such as lithium manganese-based oxides, lithium trivanadate (LiV3O8), nanostructured silicon materials [17][18][19][20][21][22][23][24][25][26][27], carbon materials such as graphite, carbon nanotubes (CNTs) and other materials are considered to be promising materials for large-scale production due to their environmental benignity, safety, good rate capability and cost-effective application for rechargeable LIBs. However, for lithium manganese-based oxides, such as spinel LiMn2−xNixO4 (0<x≤0.5) cathode oxides, the high operating voltage (~4.7 V) always results in serious electrolyte decomposition and a thick solid-electrolyte interphase (SEI) layer on the electrode surface with weak electronic and lithium conductivity [28][29][30][31][32].…”
Section: Al2o3mentioning
confidence: 99%