2001
DOI: 10.1080/13642810108225446
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Amorphous transparent conductive oxide InGaO3(ZnO)m (m≤ 4): a Zn4s conductor

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Cited by 28 publications
(48 citation statements)
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“…On the other hand, a series of n-type amorphous oxide semiconductors have been found to date, such as a-In 2 O 3 , [13] a-AgSbO 3 , [14] a-2CdO´GeO 2 , [15] a-CdO´PbO x , [16] a-InGaO 3 (ZnO) m (m £ 4), [17] and a-ZnO´SnO 2 . [18] These semiconductors are characterized by their unique electron transport properties, i.e., the absence of the Hall voltage sign double anomaly, which is commonly observed for existing amorphous semiconductors, [19] and large mobilities (e.g., Hall electron mobility >10 cm 2 V ±1 s ±1 ) comparable to those of the corresponding crystalline materials.…”
mentioning
confidence: 98%
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“…On the other hand, a series of n-type amorphous oxide semiconductors have been found to date, such as a-In 2 O 3 , [13] a-AgSbO 3 , [14] a-2CdO´GeO 2 , [15] a-CdO´PbO x , [16] a-InGaO 3 (ZnO) m (m £ 4), [17] and a-ZnO´SnO 2 . [18] These semiconductors are characterized by their unique electron transport properties, i.e., the absence of the Hall voltage sign double anomaly, which is commonly observed for existing amorphous semiconductors, [19] and large mobilities (e.g., Hall electron mobility >10 cm 2 V ±1 s ±1 ) comparable to those of the corresponding crystalline materials.…”
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confidence: 98%
“…Amorphous InGaZn-O 4 is known to be an n-type semiconductor and was fabricated by radiofrequency (RF) sputtering at room temperature. [17] It exhibited a conductivity of 1.4 10 ±1 S cm ±1 at room temperature. Carrier density is estimated to be 4.2 10 16 cm ±3 using the mobility value of 21 cm 2 V ±1 s ±1 we reported earlier.…”
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confidence: 99%
“…23 Step 3: The resultant bilayer film was fully covered by placing a YSZ plate 10 mmj10 mmj0.5 mm t on the film surface to suppress vaporization of ZnO and In 2 O 3 during the annealing in step 4.…”
Section: Introductionmentioning
confidence: 99%
“…Demands for transparent and conducting materials are rapidly 21 growing in technical applications such as transparent electrode amorphous TCOs such as indium oxide [7,8], indium gallium zinc 34 oxide [9], cadmium germinate [10,11], zinc tin oxide and zinc 35 indium oxide and its use in electronic circuits have been reported 36 [12][13][14][15][16]. These materials exhibit excellent optical transmission, 37 high electrical conductivity and high chemical stability [17][18][19][20].…”
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confidence: 99%