An Algorithm for Improving the Signal Stability of the Fast Fiber Optic Fabry-Perot Nonscanning Correlation Demodulation System

Jun-shou, 李钧寿 Li; Yong, 朱永 Zhu; Ning, 王宁 Wang; Jian-ning, 李健宁 Li

doi:10.3788/gzxb20154401.0106005

Cited by 3 publications

(1 citation statement)

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“…For Fabry-Perot structures, the variation in external pressure will result in the deformation of the membrane. The FP interference spectrum is shifted, and non-scanning correlation demodulation methods are employed to extract cavity length [18]. When a beam of light is injected into the FP cavity from the optical fiber, multiple reflections (I 1 and I 2 ) and transmissions occur on the surfaces of R 1 and R 2 , leading to multiple-beam interference.…”

Section: Probe Design and Sensor Principlementioning

confidence: 99%

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

Song,

Ma,

Zhao

et al. 2024

Micromachines

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The five-hole pressure probe based on Micro-Electro-Mechanical Systems (MEMS) technology is designed to meet the needs of engine inlet pressure measurement. The probe, including a pressure-sensitive detection unit and a five-hole probe encapsulation structure, combines the advantages of a five-hole probe with fiber optic sensing. The pressure-sensitive detection unit utilizes silicon-glass anodic bonding to achieve the integrated and batch-producible manufacturing of five pressure-sensitive Fabry–Perot (FP) cavities. The probe structure and parameters of the sensitive unit were optimized based on fluid and mechanical simulations. The non-scanning correlation demodulation technology was applied to extract specific cavity lengths from multiple interference surfaces. The sealing platform was established to analyze the sealing performance of the five-hole probe and the pressure-sensitive detection unit. The testing platform was established to test the pressure response characteristics of the probe. Experimental results indicate that the probe has good sealing performance between different air passages, making it suitable for detecting pressure from multiple directions. The pressure responses are linear within the range of 0–250 kPa, with the average pressure sensitivity of the five sensors ranging from 11.061 to 11.546 nm/kPa. The maximum non-linear error is ≤1.083%.

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Section: Probe Design and Sensor Principlementioning

confidence: 99%

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

Song,

Ma,

Zhao

et al. 2024

Micromachines

View full text Add to dashboard Cite

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Dynamic photothermal-mechanical response of a microcantilever modified by carbon nanotube film

Lin

Zhu

2016

Appl. Opt.

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Dynamic photothermal-mechanical response of a tri-material microcantilever illuminated by an intensity modulated laser source is theoretically analyzed using the heat dynamic differential model and finite element model based on the COMSOL 5.0. Tri-material microcantilever samples are fabricated by transferring carbon nanotube film onto a silicon microcantilever with aluminum coating. During the experiment, these samples are illuminated by an intensity-modulated laser pulse, and the maximum photothermal response frequency is ∼173 Hz. Experimental results are consistent with theoretical analyses. The photothermal spectroscopy detection of water vapor in the open environment is carried out, and the linear correlation coefficient between spectroscopy signal and water concentration is 0.997. Experimental results demonstrated the feasibility of tri-material microcantilever as a thermal sensor for photothermal deflection spectroscopy.

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高温高压环境下光纤法布里-珀罗传感技术研究现状

Ning¹,

Yong²,

Jie³

2023

激光与光电子学进展

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An Algorithm for Improving the Signal Stability of the Fast Fiber Optic Fabry-Perot Nonscanning Correlation Demodulation System

Cited by 3 publications

References 0 publications

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

Dynamic photothermal-mechanical response of a microcantilever modified by carbon nanotube film

高温高压环境下光纤法布里-珀罗传感技术研究现状

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