“…As it is well recognized, in LTPS-TFT driven OELD device, it has been experimentally demonstrated and theoretically verified that the process integrity of LTPS channel layer has great impact to the performance of TFT performance, such the threshold voltage (Vth), Ion, which in turn affect the light emission of the associated OLED devices. [2,3] Many failure cases have been identified to be related to the LTPS process integrity, especially the polycrystalline structure of LTPS, such as number of defective grain boundaries associated with gran size, and size distribution of poly-Si, and LTPS layer thickness uniformity. It is well known that one of the key limiting factors for LTPS TFTs performance lies in the quality of LTPS layer, such as average grain size, layer uniformity.…”