An analytical design methodology for microelectromechanical (MEM) filters

Gürbüz, Yaşar; Parlak, Mustafa; Bechteler, Thomas F.; Bozkurt, Ayhan

doi:10.1016/j.sna.2004.08.031

Cited by 10 publications

(3 citation statements)

References 3 publications

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“…We note that the parameters appearing in (9) are calculated using the global mode shapes of the filter, Fig. 2, that depend on the dimensions and specifications of the filter and the location of the coupling beam.…”

Section: Problem Formulationmentioning

confidence: 99%

“…Spatial variations in the microstructure are ignored and linear vibration theory (small-signal circuit theory) is adopted to linearize the inherently nonlinear electrostatic forces and suppress the geometric and material nonlinearities of the resonators. The resulting models, for example those by Tilmans [8] and Gurbuz et al [9], are useful in determining the small-signal steady-state frequency response of the filter. However, as the signal grows and the response becomes larger, the assumptions underlying these models break down.…”

Section: Introductionmentioning

confidence: 99%

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Modeling and analysis of electrostatic MEMS filters

2009

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We present an analytical model and closedform expressions describing the response of a tunable MEMS filter made of two electrostatic resonators coupled by a weak microbeam. The model accounts for the filter geometric and electric nonlinearities as well as the coupling between them. It is obtained by discretizing the distributed-parameter system to produce a reduced-order model. We predict the filter deflection and static pull-in voltage by solving a boundary-value problem (BVP). We also solve an eigenvalue problem (EVP) to determine the filter poles (the natural frequencies delineating the filter bandwidth). We found a good agreement between the results obtained using our model and published experimental results. We found that, when the input and output resonators are mismatched, the first mode is localized in the softer resonator whereas the second mode is localized in the stiffer resonator. We demonstrated that mismatch between the resonators can be countermanded by applying different DC voltages to the resonators. As the effective nonlinearities of the filter grow, multi-valued responses appear and distort the filter performance.Once again, we found that the filter can be tuned to operate linearly by choosing a DC voltage that makes the effective nonlinearities vanish.

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Section: Problem Formulationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Modeling and analysis of electrostatic MEMS filters

2009

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“…The use of compliant mechanisms will help in reducing the number of components, as a result decreasing manufacturing cost and increasing the performance [7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Structure topology optimization of two-dimension micro/nano angular-table

Helal

Wang

Sun

2013

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale

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Compliant mechanisms have made an enormous contribution in the design process of various fields such as for adaptive structures, handheld tools, components in transportations, electronics, and surgical tools. The use of compliant mechanisms will help in reducing the number of components, which therefore decrease manufacturing cost and additionally increase the performance. Topology optimization has proven to be a powerful method for the conceptual design of structures and mechanisms. Topology optimization is the technique that finds the optimal layout of the structure within a specified design domain. This paper presents the micro/nano angulartable compliant mechanism. The topology optimization is applied for designing twodimensional micro/nano angular table compliant mechanism. The final optimal topology configuration of the micro/nanoangular table is shown and discussed.

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