An Analytical Model for a Pneumatic Vibration Isolator with the Stiffness Effect of the Elastomeric Diaphragm

Xu, Dianna; Yu, Qiang; Shen, Fei; Zhu, Yu; Guan, Gaofeng

doi:10.1155/2018/8209290

Cited by 4 publications

(4 citation statements)

References 13 publications

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“…Shi et.al [14] perfected a stiffness model of the pneumatic spring, and IOP Publishing doi:10.1088/1742-6596/2784/1/012018 2 accurately predicted its dynamic characteristics. Xu [15] divided the diaphragm into four segments, and each segment was simplified as a unidirectional stretching elastomer, then the diaphragm's equivalent stiffness was calculated by the series-parallel combination of four segments. Lee [16], Masliyev [17] and Vo [18] studied the stiffness characteristic using the finite element method (FEM).…”

Section: Introductionmentioning

confidence: 99%

The stiffness of elastomeric diaphragm in pneumatic springs

Bai,

Che,

et al. 2024

J. Phys.: Conf. Ser.

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The design of pneumatic springs applied in precision vibration isolation platforms requires an accurate mathematical model. Many validation experiments have shown that neglecting the effect of the diaphragm on the response of a isolator can lead to a significant error between the observed and predicted behavior. This paper modifies the standard pneumatic spring model by considering the effects of the diaphragm on stiffness. A theoretical model for diaphragm stiffness is presented. The model equates the inner and outer rings of the diaphragm into two segments of composite material subjected to unidirectional stretching. The elastic modulus and stiffness of each part of anisotropic materials were obtained using the theory of composite mechanics, combined with the working conditions of the diaphragm. Finally, the dynamic stiffness experimental platform was built to verify theoretical model. The result indicates that considering the stiffness of elastomeric diaphragm, the error is reduced from 27.33% to 7.5%.

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Section: Introductionmentioning

confidence: 99%

The stiffness of elastomeric diaphragm in pneumatic springs

Bai,

Che,

et al. 2024

J. Phys.: Conf. Ser.

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“…These studies improved the prediction accuracy of the vibration responses of a pneumatic spring. Xu et al [11] examined the effect of a diaphragm used as an air-tight seal on the vibration isolation performance from the perspective of stiffness. This study increased the settling time for internal and external vibrations.…”

Section: Introductionmentioning

confidence: 99%

Vibration Control of Scanning Electron Microscopes with Experimental Approaches for Performance Enhancement

Shin

Moon

Kim³

et al. 2020

Sensors

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A vibration isolator embedded in precision equipment, such as a scanning electron microscope (SEM), wafer inspection equipment, and nanoimprint lithography equipment, play a critical role in achieving the maximum performance of the equipment during the fabrication of nano/micro-electro-mechanical systems. In this study, the factors that degrade the performance of SEM equipment with isolation devices are classified and discussed, and improvement measures are proposed from the viewpoints of the measured image patterns and vibrations in comparison with the relevant vibration criteria. In particular, this study quantifies the image patterns measured using SEMs, and the results are discussed along with the measured vibration. A guide for the selection of mounting equipment is presented by performing vibration analysis on the lower mount of the dual elastic mount configuration applied to the SEM, as well as the image patterns analyzed with that configuration. In addition, design modifications for the mount and its arrangement are suggested based on impact tests and numerical simulations.

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“…Since then, research [ 8 , 9 , 10 ] has been actively conducted to determine the equivalent stiffness using constitutive equations and the geometric shapes of materials. Recently, Xu et al [ 11 ] proposed a method of obtaining the equivalent stiffness by dividing the diaphragm into four divisions, and the effectiveness was indirectly verified using the measured transmissibility performed on the pneumatic spring system, including diaphragms and payloads. However, it was not easy to model the diaphragm accurately in an analytical manner because it is a rubber membrane with a complicated shape and it has highly nonlinear, frequency-dependent, and amplitude-dependent characteristics.…”

Section: Introductionmentioning

confidence: 99%

Estimation of the Complex Dynamic Stiffness of Inflated Rubber Diaphragms in Pneumatic Springs Using Finite Element Method

Shin

Lee

2020

Sensors

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The accurate modeling of the complex dynamic stiffness of inflated rubber diaphragms in pneumatic springs is necessary for an efficient design of vibration isolation tables for precision instruments, such as optical devices and nano-scale equipment. In addition to pressurized air, rubber diaphragms, essentially employed for the prevention of air leakage, make a significant contribution to the total complex stiffness. To reflect the effect of the dynamic stiffness of the inflated rubber diaphragm on the total complex stiffness during the initial design or design improvement stage, it is desirable to predict the complex stiffness of the inflated rubber diaphragm beforehand. In this paper, an estimation method for the complex stiffness of inflated rubber diaphragms using the commercial finite element method (e.g., ABAQUS) is proposed. The proposed method reflects their dynamic characteristics under the large static deformation by the Mooney–Rivlin and Morman’s constitutive equations. The results of comparison with experimental results indicate that the predictions obtained by the proposed method are congruent with the experimental values of the diaphragm.

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An Analytical Model for a Pneumatic Vibration Isolator with the Stiffness Effect of the Elastomeric Diaphragm

Cited by 4 publications

References 13 publications

The stiffness of elastomeric diaphragm in pneumatic springs

The stiffness of elastomeric diaphragm in pneumatic springs

Vibration Control of Scanning Electron Microscopes with Experimental Approaches for Performance Enhancement

Estimation of the Complex Dynamic Stiffness of Inflated Rubber Diaphragms in Pneumatic Springs Using Finite Element Method

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