An e-beam comb-probe printer for nanolithography

Outline of a variable-axis lens with arbitrary shift of the axis in one direction

“…11 Another periodic system which does not obey condition ͑3͒ and still yields stigmatic imaging in a global way can be assembled out of a cylinder einzel lens by employing three comb electrodes, where the central comb is put at an average potential which differs from that of the outer electrodes. Therefore beam broadening due to Coulomb interactions does not depend on the number of beams.…”