“…The new high-speed, high-integration, low-power switching circuit and power amplifier circuits required by various power conversion and energy processing devices are core devices based on SOI LDMOS devices [4]. However, on the one hand, the SOI power device isolates the surface of the device from the substrate due to the buried layer of the dielectric, thereby generating a self-heating effect, which affects the normal operation and reliability of the device [5][6]. On the other hand, at the Si / SiO2 interface of conventional SOI LDMOS structure, the critical breakdown electric field of Si is lower than that of SiO2, so the breakdown usually occurs at the Si layer of the interface, which makes the high critical breakdown electric field of SiO2 underutilized and the breakdown voltage of the device low [7][8].…”