An Electric Field Microsensor with Mutual Shielding Electrodes

Lei, Hucheng; Xia, Shanhong; Chu, Zhaozhi; Ling, Biyun; Peng, Chunrong; Zhang, Zhouwei; Liu, Jun; Zhang, Wei

doi:10.3390/mi12040360

Cited by 11 publications

(4 citation statements)

References 34 publications

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“…In recent decades, with the development of Micro-Electro-Mechanical Systems (MEMS) technology, electric field sensors based on MEMS have become a research hotspot due to their small size, low power consumption, and mass production. MEMS-based electric field sensors can be classified into various types, such as charge induction [ 9 , 10 , 11 , 12 , 13 ], electrostatic force [ 14 , 15 , 16 ], and steered electron [ 17 ] field sensors. Resonant electric field microsensors based on charge induction have become the mainstream of MEMS electric field sensors due to their high sensitivity characterization.…”

Section: Introductionmentioning

confidence: 99%

A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology

Gao,

Peng,

Liu

et al. 2024

Micromachines

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In order to enhance the sensitivity of wafer-level vacuum-packaged electric field sensors, this paper proposed a vertical-resonant MEMS electric field sensor based on TGV (Through Glass Via) technology. The microsensor is composed of the electric field sensing cover, the drive cover, and the SOI-based microstructures between them. TGV technology is innovatively used to fabricate the electric field sensing cover and the vertically-driven cover. The external electric field is concentrated and transmitted to the area below the silicon plate in the center of the electric field sensing cover through a metal plate and a metal pillar, reducing the coupling capacitance between the silicon plate and the packaging structure, thereby achieving the enhanced transmission of the electric field. The sensitivity-enhanced mechanism of the sensor is analyzed, and the key parameters of the sensor are optimized through finite element simulation. The fabrication process is designed and realized. A prototype is tested to characterize its performance. The experimental results indicate that the sensitivity of the sensor is 0.82 mV/(kV/m) within the electrostatic electric field ranging from 0–50 kV/m. The linearity of the sensor is 0.65%.

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Section: Introductionmentioning

confidence: 99%

A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology

Gao,

Peng,

Liu

et al. 2024

Micromachines

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“…The MEMS electrostatic field sensors that have been reported can be classified into three categories according to their measurement principles, namely induction charge [ 7 , 8 , 9 , 10 , 11 ], steered electrons [ 12 ], and electrostatic force [ 13 , 14 , 15 ]. The induction charge MEMS electrostatic field sensors are the most mature, with the best electrostatic field resolution of 30 V/m [ 11 ].…”

Section: Introductionmentioning

confidence: 99%

A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation

et al. 2023

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This paper proposes a highly sensitive and high-resolution resonant MEMS electrostatic field sensor based on electrostatic stiffness perturbation, which uses resonant frequency as an output signal to eliminate the feedthrough interference from the driving voltage. The sensor is composed of a resonator, driving electrode, detection electrode, transition electrode, and electrostatic field sensing plate. The working principle is that when there is an electrostatic field, an induction charge will appear at the surface of the electrostatic field sensing plate and induce electrostatic stiffness on the resonator, which will cause a resonant frequency shift. The resonant frequency is used as the output signal of the microsensor. The characteristics of the electrostatic field sensor are analyzed with a theoretical model and verified by finite element simulation. A device prototype is fabricated based on the Silicon on Insulator (SOI) process and tested under vacuum conditions. The results indicate that the sensitivity of the sensor is 0.1384Hz/(kV/m) and the resolution is better than 10 V/m.

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“…The study on the resonant electric field microsensor began in the 1990s, to our knowledge. Since then, the electric field resolution is being improved, from 630 V/m to 20.4 V/m, by various innovative micro sense structures [ 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 ], under the parallel plate calibration. The electric field microchips were mostly exposed to the external environment for test, historically.…”

Section: Introductionmentioning

confidence: 99%

Resolution-Enhancing Structure for the Electric Field Microsensor Chip

Yang

Zhang

et al. 2021

Micromachines

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Electrostatic voltage is a vital parameter in industrial production lines, for reducing electrostatic discharge harms and improving yields. Due to such drawbacks as package shielding and low resolution, previously reported electric field microsensors are still not applicable for industrial static monitoring uses. In this paper, we introduce a newly designed microsensor package structure, which enhances the field strength inside the package cavity remarkably. This magnification effect was studied and optimized by both theoretical calculation and ANSYS simulation. By means of the digital synthesizer and digital coherent demodulation method, the compact signal processing circuit for the packaged microsensor was also developed. The meter prototype was calibrated above a charged metal plate, and the electric field resolution was 5 V/m, while the measuring error was less than 3 V, from −1 kV to 1 kV in a 2 cm distance. The meter was also installed into a production line and showed good consistency with, and better resolution than, a traditional vibratory capacitance sensor.

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An Electric Field Microsensor with Mutual Shielding Electrodes

Cited by 11 publications

References 34 publications

A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology

A Sensitivity-Enhanced Vertical-Resonant MEMS Electric Field Sensor Based on TGV Technology

A Highly Sensitive and High-Resolution Resonant MEMS Electrostatic Field Microsensor Based on Electrostatic Stiffness Perturbation

Resolution-Enhancing Structure for the Electric Field Microsensor Chip

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