An electric induction micromotor

Nagle, Steven F.; Livermore, Carol; Fréchette, Luc; Ghodssi, Reza; Lang, Jeffrey H.

doi:10.1109/jmems.2005.851816

Cited by 47 publications

(28 citation statements)

References 10 publications

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“…New micromotor 2 10 65% Tong et al [19] (piezoelectric) 10 3.5% Merzaghi et al [4] (electromagnetic) Ghalichechian et al [12] (electromagnetic) Nagle et al [17] (electromagnetic) …”

Section: ) Efficiencymentioning

confidence: 99%

Novel electric micromotor for consumer electronics applications

Bakhoum

Cheng

2012

IEEE Trans. Consumer Electron.

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This paper introduces a novel electric micromotor that will be useful for a broad new array of consumer products. The micromotor has achieved an efficiency of 65% and a minimum torque of 11.6 N.m. in a package with a volume of approximately 50 mm 3 . The device essentially consists of a very small quantity of water, a group of bubble injectors (similar to those used in inkjet printer technology), and an impeller. The bubble injectors propel high-velocity water micro-droplets toward the impeller, forcing it to rotate. The water is collected and is circulated back to the injectors. Comparisons with other existing micromotor technologies are given 1 .

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“…New micromotor 2 10 65% Tong et al [19] (piezoelectric) 10 3.5% Merzaghi et al [4] (electromagnetic) Ghalichechian et al [12] (electromagnetic) Nagle et al [17] (electromagnetic) …”

Section: ) Efficiencymentioning

confidence: 99%

Novel electric micromotor for consumer electronics applications

Bakhoum

Cheng

2012

IEEE Trans. Consumer Electron.

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“…This gives rise to tangential electric field component that pulls the image charges and results in a torque on the rotor [13]. An induction motor with a rotor diameter of 4 mm has been developed by a team from Massachusetts Institute of Technology (MIT) for Power MEMS applications [12,18]. The motor is capable of generating an output torque of 3.5 mNm at speeds and powers in excess of 55,000 rpm and 20 mW.…”

Section: Motor Designsmentioning

confidence: 99%

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

Liu

Friend

Yeo

2010

Acoust. Sci. & Tech.

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Though miniaturization and mass production via integrated circuit fabrication techniques have transformed our society, the methods have yet to be successfully applied to the generation of motion, and as a consequence the many potential benefits of microrobotics has yet to be realized. The characteristics of electrostatic, electromagnetic and piezoelectric transduction for generating motion at the micro scale is considered, employing scaling laws and a reasoned consideration of the difficulties in motor fabrication and design using each method. The scaling analyses show that electrostatic, electromagnetic and piezoelectric actuators all have comparable force scaling characteristics of F / L 2 ; if one employs permanent magnets, electromagnetic forces do not scale as F / L 4 . Though the torque, (, of piezoelectric ultrasonic motors scale rather poorly with ( / L 4 , they have the clear advantage of possessing torque amplitudes some two orders of magnitude larger than motors employing the other transduction schemes at the micro scale.

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“…(15) The motor, voltage-induction-type electrostatic motors (VITEMs), (17) realizes high voltage on its slider using dedicated induction capacitors. In conventional electrostatic induction motors, electrostatic induction occurs within the driving area; the voltages on the stator driving electrodes induce potential on their facing slider area (6)- (12) (or facing slider electrodes (13), (14) ).…”

Section: Introductionmentioning

confidence: 99%

Effects of Electrode Configuration for Performances of Voltage-Induction-Type Electrostatic Motors

Yamashita

Yamamoto

Higuchi

2013

JAMDSM

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This paper describes a general theory for the characteristics of voltage-induction-type electrostatic motors (VITEMs). VITEMs are one of macro-scale electrostatic film motors with multi-phase electrodes on both the sliders and the stators. The motor drives synchronously without voltage feeding wires to its slider due to the indirect power supply using electrostatic induction. Although the numbers of electrode phases can be chosen arbitrary to realize the motor, the characteristics of the motors were analyzed only for two specific cases in the previous studies. This work extends the previously proposed theories so that they can handle a general case, in which the slider and the stator have m-and n-phase electrodes with arbitrary numbers for m and n. The theory can estimate the optimized thrust force performance for any electrode configurations, when given fundamental parameters regarding the capacitance coefficients of the motor, which can be obtained either experimentally or numerically. Using the proposed theory, several different configurations of VITEMs are analyzed and compared, in terms of thrust force performance. The results indicate that electrode thickness considerably affects the thrust force performance of VITEMs, which is not the case for other synchronous electrostatic film motors, and thus suggest that the design of VITEMs should more carefully consider the three-dimensional structure of the electrodes.

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An electric induction micromotor

Cited by 47 publications

References 10 publications

Novel electric micromotor for consumer electronics applications

Novel electric micromotor for consumer electronics applications

A brief review of actuation at the micro-scale using electrostatics, electromagnetics and piezoelectric ultrasonics

Effects of Electrode Configuration for Performances of Voltage-Induction-Type Electrostatic Motors

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