A new capacitive pressure sensor with very large dynamic range is introduced. The sensor is based on a new technique for substantially changing the surface area of the electrodes, rather than the inter-electrode spacing as commonly done at the present. The prototype device has demonstrated a change in capacitance of approximately 2500 pF over a pressure range of 10 kPa.Index Terms-Capacitive pressure sensor, pressure sensor, sensor dynamic range.

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Abstract:A number of well-known difficulties in physics resulted from merging the theory of relativity with the Compton-de Broglie wave mechanics. Two such problems were the failure of Dirac's relativistic wave equation to predict the correct velocity of the electron, and the fact that the measured yield from nuclear fission was found to be substantially less than the theoretical yield. It is shown that the origin of these and other problems stem from the inconsistency of the relativistic mass-energy equivalence principle with the fundamental assumptions of wave mechanics. An alternative view of the concept of mass-energy equivalence that results in a very good agreement between theory and experiment is demonstrated. The conclusions of this paper will be quite important for ongoing research, such as the current problem of the neutrino's mass.

Accurate motion control for multiaxis motion systems is an important issue for manufacturing industry. In this brief, an adaptive robust control scheme is implemented to synthesize the compensator for tracking and synchronization with the consideration of cross-coupling dynamics among different axes. By using the adaptive strategies, the asymptotic convergence of both tracking and synchronization errors are achieved. The robust control scheme also guarantees the transient performance, tracking errors, and synchronization errors. Experimental results of a three-axis motion system that include system uncertainties and nonlinearity are also illustrated to verify the effectiveness of the proposed approach for different scenarios. The results indicate excellent transient performance as well as both tracking and synchronization accuracies.

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