An Electromagnetic Actuator Using a Cylindrical Coil Created wilth 3D X-ray Lithography and Metallization Techniques

Matsumoto, Yoshihisa; Yamashita, Shuhei; Noda, Daiji; Hattori, Tadashi

doi:10.1109/mhs.2006.320225

Cited by 7 publications

(5 citation statements)

References 2 publications

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“…Their construction should be as simple as possible. To meet these requirements, we designed a solenoid type actuator (4) . The external shape of actuator is shown in Fig 1. For this actuator, a coil is incorporated into a magnetic circuit consisting of a fixed iron core, plunger, and yoke.…”

Section: Design Of the Electromagnetic Actuatormentioning

confidence: 99%

Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators

Setomoto

Matsumoto

Yamashita

et al. 2008

JAMDSM

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With the recent progress in downsizing and the sophistication of various industrial products, the need for more compact actuators is increasing. Actuators account for the larger percentage of volume and weight of a product compared with other parts and devices. We have proposed fabrication process of spiral micro coils that employs X-ray lithography. This process will be effective for fabricating coils of a high aspect ratio lines. Reducing the size of coil lines and increasing their aspect ratio are expected to reduce the size and increase the output of actuators. Using this process, we formed spiral coil lines that can be used in electromagnetic actuators. X-ray lithography was used to form a high aspect ratio helical structure on the surface of an acrylic resin pipe. As a measure to suppress void generation, which is one of the shortcomings of electroplating processes, the sputtering apparatus and plating equipment were improved, a pretreatment process was additionally provided, and the actual electroplating method was improved. As a result, a void-free metallic deposit could be formed on a thin coil line. At the final step of this research study, we etched the coil line to determine optimal etching conditions.

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Section: Design Of the Electromagnetic Actuatormentioning

confidence: 99%

Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators

Setomoto

Matsumoto

Yamashita

et al. 2008

JAMDSM

Self Cite

View full text Add to dashboard Cite

show abstract

“…For the 4 mm diameter bars, the X-ray . SEM image of after X-ray lithography with 10 µm line and 30 µm space structure exposure process was divided into 60 steps in order to approximate continuous exposure ( 6)- (8) . Thus, the master brass bar for coil lines was rotated though an angle of 6 degrees while the X-ray mask was advanced by just 1/60 pitch for each X-ray exposure cycle, as shown in Fig.…”

Section: X-ray Lithography Processmentioning

confidence: 99%

“…This stage makes it feasible to fabricate 3D microstructure such as spiral microcoil (4) (5) . This technique also offers the possibility of creating current paths with large cross-sectional areas and high permissible currents in narrow pitch coil lines ( 6)- (8) .…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Microcoils Using X-ray Lithography and Metallizaiton

et al. 2008

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MemberCoils and actuators are finding an increasing number of uses in various fields. The demand for microcoils and microactuators is increasing due to the recent progress in downsizing and the increasing sophistication of various industrial products. Actuators account for a large percentage of the total volume and weight of many product compared with other parts and devices that are typically included. However, coils are unsuitable for miniaturization because of their structure. Therefore, we have proposed the use of high aspect ratio microcoils in order to reduce their size and to increase their performance. To realize microcoils such as these, we have developed a fabrication process based on three-dimensional deep X-ray lithography and metallization techniques. We have also used a dipping method in order to obtain thick layers of photoresist on metal bar with diameters of 1 mm. In this paper, we have fabricated microcoils with 10 µm line widths, 20 µm pitch, and aspect ratio of over 5. There is every expectation that high performance microcoils with high aspect ratio coil lines could be manufactured by this process, despite their miniature size.

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“…Using the X-ray lithography technique, coil lines were obtained narrow and high aspect ratio [5][6][7][8] . Figure 1 shows the calculation of Q factor and resistance for different aspect ratios of the microcoils.…”

Section: Introductionmentioning

confidence: 99%

Formation of High Aspect Ratio Microcoil Using Dipping Method

Noda

Yamashita

Matsumoto

et al. 2008

JAMDSM

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Coils are used in many electronic devices as inductors in mobile units such as mobile phone, digital cameras, etc. Inductance and quality factor of coils are very important value of the performance. Therefore, the requests for coils are small size, high inductance, low power consumption, etc. However, coils are unsuitable for miniaturization because of its structure. Therefore, we have proposed and developed the microcoils of high aspect ratio with the dipping method and an X-ray lithography technique. In dipping method, centrifugal force and highly viscous photoresist solution were key points to evenly apply resist in the form of thick film on metal bar. The film thickness of resist on bar was achieved about 50 µm after single coating. Using these techniques, we succeeded in creating threaded groove structure with 10 µm lines and spaces on 1 mm brass bar. In this case, the aspect ratio was achieved five. It is very expected the high performance microcoil with high aspect ratio lines could be manufactured in spite of the miniature size.

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An Electromagnetic Actuator Using a Cylindrical Coil Created wilth 3D X-ray Lithography and Metallization Techniques

Cited by 7 publications

References 2 publications

Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators

Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators

Fabrication of Microcoils Using X-ray Lithography and Metallizaiton

Formation of High Aspect Ratio Microcoil Using Dipping Method

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