An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry

Lullin, Justine; Bargiel, Sylwester; Lemoal, Patrice; Perrin, Stéphane; Albero, Jorge; Passilly, Nicolas; Froehly, Luc; Lardet‐Vieudrin, F.; Gorecki, Christophe

doi:10.1088/0960-1317/25/11/115013

Cited by 10 publications

(10 citation statements)

References 23 publications

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“…This is because of the vertical mechanical deformation of the suspended platform. Sasaki et al studied the impact of the error of the displacement amplitude on the sinusoidal modulation in interferometric applications [15]. This displacement of 70 nm is within the tolerances presented in the article.…”

Section: Dynamic Characterizationmentioning

confidence: 59%

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Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry

et al. 2016

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In this paper, we present construction, fabrication and characterization of an electrostatic MOEMS vertical microscanner for generation of an optical phase shift in array-type interferometric microsystems. The microscanner employs asymmetric comb-drives for a vertical displacement of a large 4x4 array of reference micromirrors and for in-situ position sensing. The device is designed to be fully compatible with Mirau configuration and with vertical integration strategy. This enables further integration of the device within an "active" multi-channel Mirau micro-interferometer and implementation of the phase shifting interferometry (PSI) technique for imaging applications. The combination of micro-interferometer and PSI is particularly interesting in the swept-source optical coherence tomography, since it allows not only strong size reduction of a system but also improvement of its performance (sensitivity, removal of the image artefacts). The technology of device is based on double-side DRIE of SOI wafer and vapor HF releasing of the suspended platform. In the static mode, the device provides vertical displacement of micromirrors up to 2.8µm (0 -40V), whereas at resonance (fo=500 Hz), it reaches 0.7 µm for only 1VDC+1VAC. In both operation modes, the measured displacement is much more than required for PSI implementation (352nm peak-to-peak). The presented device is a key component of array-type Mirau micro-interferometer that enables the construction of portable, low-cost interferometric systems, e.g. for in vivo medical diagnostics.

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Section: Dynamic Characterizationmentioning

confidence: 59%

“…The construction of the microscanner is schematically presented in Figure 2a [15]. The device consists of 4x4 array of reference micromirrors (400 x 400 µm 2 ), which are integrated within silicon platform.…”

Section: Design and Simulation Of Vertical Microscannermentioning

confidence: 99%

Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry

et al. 2016

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“…The resonance frequency is found to be 485Hz. 12 Moreover, the reference mirrors wafer has to be compatible with the overall integration strategy based on anodic bonding (materials, process temperature, surface quality). Electrical interconnections are needed to drive the actuators by external electronics.…”

Section: Doublet Of Lensesmentioning

confidence: 99%

Array-type miniature interferometer as the core optical microsystem of an optical coherence tomography device for tissue inspection

et al. 2016

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Some of the critical limitations for widespread use in medical applications of optical devices, such as confocal or optical coherence tomography (OCT) systems, are related to their cost and large size. Indeed, although quite efficient systems are available on the market, e.g. in dermatology, they equip only a few hospitals and hence, are far from being used as an early detection tool, for instance in screening of patients for early detection of cancers. In this framework, the VIAMOS project aims at proposing a concept of miniaturized, batch-fabricated and lower-cost, OCT system dedicated to non-invasive skin inspection. In order to image a large skin area, the system is based on a full-field approach. Moreover, since it relies on micro-fabricated devices whose fields of view are limited, 16 small interferometers are arranged in a dense array to perform multi-channel simultaneous imaging. Gaps between each channel are then filled by scanning of the system followed by stitching

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“…Indeed, by Deep Reactive Ion Etching (DRIE) technology, the silicon substrate and III-V compound semiconductors can be etched fairly quickly and manufactured at low cost for mass production 6,7 . This plasma technology is becoming increasingly attractive in a very wide set of applications [8][9][10][11] as well as for microfluidic devices [12][13][14] , microprobes 15 , microlens molds [16][17][18] , roll bearing components 19 and micro-optic structures 20 .…”

Section: Introductionmentioning

confidence: 99%

Fast ultra-deep silicon cavities: Toward isotropically etched spherical silicon molds using an ICP-DRIE

Herth

Barański

Berlharet

et al. 2019

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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HAL is a multidisciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

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An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry

Cited by 10 publications

References 23 publications

Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry

Vertical comb-drive microscanner with 4x4 array of micromirrors for phase-shifting Mirau microinterferometry

Array-type miniature interferometer as the core optical microsystem of an optical coherence tomography device for tissue inspection

Fast ultra-deep silicon cavities: Toward isotropically etched spherical silicon molds using an ICP-DRIE

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