An ellipsometric method for determining the optical parameters of thin-film coatings with a complex structure

Tikhii, A. A.; Gritskikh, V. A.; Kara-Murza, S. V.; Korchikova, N. V.; Nikolaenko, Yu. M.; Faraponov, V. V.; Zhikharev, I. V.

doi:10.1134/s0030400x15080238

Cited by 7 publications

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“…Revised values of layer thicknesses and refraction indices were derived from ellipsometric measurement data [9,10]. The measurement results were processed with optimization methods [9][10][11] with an error below 1%. The spectrometry and ellipsometry data were used to determine the dispersion characteristic of the refraction indices of the BFO film and the buffer STO layer (see the table and Fig.…”

Section: Resultsmentioning

confidence: 99%

“…Ellipsometric measurements were performed using a multiangle reflective null ellipsometer at the helium-neon laser wavelength (632.8 nm). Ellipsometric angles and , which specify the variation of parameters of the polarization ellipse in reflection of elliptically polarized light off the surface of a solid [9][10][11], were calculated based on the measured azimuths of the polarizer in the input ellipsometer arm and the analyzer in the output arm.…”

Section: Methods Of Fabrication and Examination Of Samplesmentioning

confidence: 99%

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Investigation of the optical properties of a BiFeO-=SUB=-3-=/SUB=-/SrTiO-=SUB=-3-=/SUB=- heterostructure grown on an Al-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=-(0001) substrate by RF cathode sputtering

Kara-Murza

Zhidel

Korchikova

et al. 2022

Optics and Spectroscopy

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The phase composition, structure, and optical properties of the BiFeO3/SrTiO3/Al2O3 (c-cut) heterostructure have been studied using XRD analysis, spectrophotometry, and multi-angle ellipsometry. BFO/STO/Al2O3 heterostructures have been obtained by high-frequency cathode sputtering in an oxygen atmosphere using the intermittent deposition technology. It was found that the BiFeO3 and SrTiO3 layers grew with an orientation in the direction of the [111] crystallographic axis parallel to the normal to the Al2O3 substrate. It has been shown that the damaged layer on the surface of the heterostructure does not exceed 2-3 nm, and no signs of the presence of boundary layers at the Al2O3-SrTiO3 and SrTiO3-BiFeO3 interfaces have been identified. The dispersion dependences of the refractive indices of BFO and STO layers are calculated. The reasons for the revealed regularities are discussed. Keywords: thin films, multiferroic, optical properties, ellipsometry, bismuth ferrite.

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Section: Resultsmentioning

confidence: 99%

Section: Methods Of Fabrication and Examination Of Samplesmentioning

confidence: 99%