An emission actinometric method for measuring of plasmachemical reaction kinetic parameters with discharge power modulation by a series of short probing pulses

Shogun, V.; Tyablikov, A.; Abachev, M.; Pashkov, V. M.; Scharff, W.; Wallendorf, T.

doi:10.1016/s0257-8972(97)00259-4

Cited by 4 publications

(1 citation statement)

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“…Up to now the detection of CF 3 radicals has been restricted to IRLAS measurements [8,9,12]. Fluorine concentrations in fluorocarbon plasmas are primarily studied using the emission spectroscopic method of actinometry [13][14][15][16], but vacuum ultraviolet absorption spectroscopy (VUVAS) [17,18] has also been demonstrated to be a sensitive diagnostic. A major objective is to identify the dominant production and removal mechanisms of the F and CF x radicals.…”

Section: Introductionmentioning

confidence: 99%

Sources and sinks of CF and CF₂ in a cc-RF CF₄-plasma under various conditions

Fendel

Francis

Czarnetzki

2004

Plasma Sources Sci. Technol.

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In an asymmetric capacitively coupled radio-frequency (cc-RF) CF 4 plasma, the radical densities of CF and CF 2 were measured using laser-induced fluorescence spectroscopy. From the spatially (along the symmetry axis) and temporally (after switching off the discharge) resolved data, the source distribution and the sticking coefficients are inferred. We present results for three different electrode materials (stainless steel, aluminium and silicon). According to our data, the strength and the position of the sources depend strongly on the electrode material and the applied voltage. While the CF-sources are in the sheath in front of the powered electrode for stainless steel, they are on the surface of the powered electrode in the case of aluminium. By using a simple diffusion model for the analysis of the afterglow data, it can be shown that CF 2 is destroyed exclusively at the walls and the decay time is determined by diffusion and sticking only. In contrast, for CF, surface as well as volume losses due to chemical reactions are important.

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