2002
DOI: 10.1063/1.1469674
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An emissive probe with a rhenium filament for measuring plasma potential in a radio frequency oxygen plasma

Abstract: Plasma potential measurements in a rf inductively coupled oxygen plasma were carried out using an emissive probe with rhenium filaments. Rhenium was chosen because of the remarkable electrical conductivity of its oxide which is 108 times higher than tungsten oxide. Using 75 μm diam filaments hot-wire emissive probe measurements of an oxygen plasma potential were performed in pressures of 3–100 mTorr. Due to surface contaminants, filament conditioning was performed in order to allow electron emission. Analysis … Show more

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Cited by 9 publications
(7 citation statements)
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“…Tungsten is an unsuitable choice for an emissive probe if oxygen is present in the plasma [62]. A heated tungsten wire will rapidly oxidize in an oxygen-rich environment and tungsten oxide is many orders of magnitude less conductive than pure tungsten.…”
Section: Methodsmentioning
confidence: 99%
“…Tungsten is an unsuitable choice for an emissive probe if oxygen is present in the plasma [62]. A heated tungsten wire will rapidly oxidize in an oxygen-rich environment and tungsten oxide is many orders of magnitude less conductive than pure tungsten.…”
Section: Methodsmentioning
confidence: 99%
“…Emissive probes are used for direct measurements of the plasma potential and its fluctuations in various types of plasmas -e. g. [1,2,3]. These quantities cannot be directly obtained by "cold" (i. e. non-emissive) Langmuir probes.…”
Section: Introductionmentioning
confidence: 96%
“…Another important, however, indirect method was later described by Smith et al [39] who argued that the inflection point of an emissive probe characteristic, at moderate emission current, yields a more precise measure for the plasma potential. Later on, eminent contributions to the plasma diagnosis with emissive probes were made especially by Hershkowitz and his group [40][41][42][43][44][45][46][47][48][49][50]. Other papers were devoted mainly to the experimental and theoretical principles of emissive probes [19,21,[33][34][35][36].…”
Section: Electron Emissive Probes (Eep) 21 Basics Of Electron Emissive Probes (Eep)mentioning
confidence: 99%