2011
DOI: 10.1088/0963-0252/20/6/063001
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Emissive probes

Abstract: For over 80 years emissive probes have been used to measure plasma potential and a wide variety of methods for interpreting probe data now exists. Constructions, heating methods and measurement techniques are reviewed in detail and their various strengths and limitations are compared. Additionally, several novel uses for emissive probes, such as measuring electron temperature are presented. This review also includes tables of recommendations for emissive probe design given the type of plasma and desired measur… Show more

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Cited by 199 publications
(219 citation statements)
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References 93 publications
(246 reference statements)
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“…1(b), changes with input RF power and gas pressure (not shown in the figure). The diffused plasma in the main experimental chamber is characterized thoroughly by different electrostatic probes namely, the single 42 and double 43 Langmuir probes and emissive probe 44 in a working range of RF power (4-10 W) at argon pressure p = 0.04 mbar. Plasma parameters traces along X and Y-axes for working discharge parameters are depicted in the Sec.IV.…”
Section: Experimental Setup and Diagnosticsmentioning
confidence: 99%
“…1(b), changes with input RF power and gas pressure (not shown in the figure). The diffused plasma in the main experimental chamber is characterized thoroughly by different electrostatic probes namely, the single 42 and double 43 Langmuir probes and emissive probe 44 in a working range of RF power (4-10 W) at argon pressure p = 0.04 mbar. Plasma parameters traces along X and Y-axes for working discharge parameters are depicted in the Sec.IV.…”
Section: Experimental Setup and Diagnosticsmentioning
confidence: 99%
“…This device produces plasmas with electron densities of n e ~ 0.1-8 x 10 8 cirr 3 and electron temperatures between T e ~ 1-2 eV. The neutral gas pressures inside the vacuum chamber were in the range of 8 x 10~4 and 3 x 10~3 mBar of argon that were held constant by means of a Bronkhorst F-210C leak valve driven by the E7100 controller.…”
Section: Methodsmentioning
confidence: 99%
“…The simplest method, i.e., floating potential method (see ref. [30] and references therein), is followed to measure these potentials. The cold emissive probe acts as a single Langmuir probe and gives the floating potential (V f ) at zero emission current.…”
Section: Characterization Of Inductive Diffused Plasmamentioning
confidence: 99%