2010
DOI: 10.1115/1.4001745
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An Experimental Investigation in the Performance of Water-Filled Silicon Microheat Pipe Arrays

Abstract: This study details the fabrication and measurements of a water-filled 5 mm wide by 10 mm long silicon microheat pipe (MHP) array consisting of 22–100 μm square channels. This study is unique in that many experimental results reported in open literature are for single channel microheat pipes. The number of channels in the array and the fluid charge used here were optimized under a separate study. A number of experiments were carried out on the specimen MHPs to determine their effective thermal conductivity and … Show more

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Cited by 13 publications
(5 citation statements)
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“…Thus, improved measurement reproducibility will save companies in the electronics industry, which frequently tests TIMs, time and money. As a compounding factor, the advent of new materials has introduced a class of high-performance TIMs [1][2][3][4][5] that are difficult to characterize properly because they have thermal resistances lower than the uncertainty floor of commercially available measurement tools. Research to improve these characterization tools is critical in order for high-performance TIMs to be successfully introduced into the market.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, improved measurement reproducibility will save companies in the electronics industry, which frequently tests TIMs, time and money. As a compounding factor, the advent of new materials has introduced a class of high-performance TIMs [1][2][3][4][5] that are difficult to characterize properly because they have thermal resistances lower than the uncertainty floor of commercially available measurement tools. Research to improve these characterization tools is critical in order for high-performance TIMs to be successfully introduced into the market.…”
Section: Introductionmentioning
confidence: 99%
“…The novel MHPs demonstrate 10.6 times higher in the maximum equivalent thermal conductivity than that of the pure silicon wafer. In order to comprehensively understand the thermal performance of MHPs, micro-temperature sensors including poly-silicon integrated thermistors [36,[41][42][43][44] and platinum resistance temperature detectors (RTDs) [45] were used to obtain temperature profile along the longitudinal axis of a MHP array precisely.…”
Section: Experimental Investigationmentioning
confidence: 99%
“…Especially, heat pipes with rectangular grooved wicks are an essential part of the thermal management in space applications since they enable the transportation of liquid in long distances due not only to their higher permeability compared to their sintered counterparts [3,4,5] but also their ease of manufacture [6,7,8]. Moreover, utilization of embedded micro-grooves is much more feasible compared to the wicks with sintered grains and wire meshes passive in the chip-level electronic cooling applications [9,10,11].…”
Section: Introductionmentioning
confidence: 99%