An Experimental Investigation on the Quasi-Static Flotation Transport of a Glass Substrate Using Vortex Bearing Elements

Li, Xin; Nakamura, Yu; Horie, Mikio; Kagawa, Toshiharu

doi:10.4236/jfcmv.2013.11002

Cited by 4 publications

(2 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…There are three types of air flotation units, namely, orifice, porous material, and rotation flow air flotation units. 1–6 The orifice type has the most typical design, with the advantages of a simple structure and easy processing. The orifice-type air flotation platform is the most widely used.…”

Section: Introductionmentioning

confidence: 99%

Force characteristics and two-dimensional pressure fields of air flotation units with different numbers and distribution radii of orifices

Zou

Shi

et al. 2019

Proceedings of the Institution of Mechanical Engineers, Part C:

Self Cite

View full text Add to dashboard Cite

Air flotation rails are widely used in semiconductor production lines for handling components such as liquid crystal glass substrates and wafers. In this study, the effects of the number and distribution radius of the orifices of the basic component (hereinafter referred to as air flotation unit) of the utilized air-suspension orbit were theoretically and experimentally investigated. The pressure distribution of the air flotation unit was first calculated using the Reynolds equation. The flotation forces and two-dimensional pressure fields of six different air flotation units with different numbers and distribution radii of the orifices were then experimentally measured. Based on the experimental data, we analyzed the effect of the inertia item of the flow, the impact of the no-flow region within the distribution circle, and the changes brought about by the number and distribution radius of orifice, etc. The findings of this study afford important theoretical and experimental references for the design of air flotation rails.

show abstract

Section: Introductionmentioning

confidence: 99%

Force characteristics and two-dimensional pressure fields of air flotation units with different numbers and distribution radii of orifices

Zou

Shi

et al. 2019

Proceedings of the Institution of Mechanical Engineers, Part C:

Self Cite

View full text Add to dashboard Cite

show abstract

“…As integrated circuit manufacturing technology advances, manufacturers are developing larger-sized products to improve production efficiencies and reduce costs [17,18]. For example, a tenth generation thin flat panel glass substrate approximates 3 × 3 m 2 .…”

Section: Introductionmentioning

confidence: 99%

Estimation of deformation for a glass sheet on a noncontact air conveyor with film pressure feedback

Yang

Zhong

Lin

et al. 2019

Meas. Sci. Technol.

View full text Add to dashboard Cite

Recently, air film conveyors equipped with porous pads have been developed to transport large, thin glass substrates in a contactless state. The deformation of the glass substrates should be monitored for the inspection process on the production line. Although laser sensors can be applied to detect the deformation along a given path, there are some problems such as poor efficiency and low real-time performance. For the purpose of estimating the deformation of the floating glass sheet indirectly, in this paper a film pressure feedback method is proposed and studied via theoretical analysis and experimental verifications. First, a theoretical model including the characteristics of the porous media and gap flow is established, and the model is solved by the finite volume method to obtain the film pressure distribution. Then, an experimental apparatus is built to measure the film pressure with different degrees of deformation of the glass sheet. Comparisons of the calculated film pressure with the measured data indicate that deviations gradually appear for the outer units as the deformation degree enlarges. Thus, we use four inner pressure points as the feedback and apply a proportionalintegral algorithm to adjust the deformation shape in terms of a quadratic curve. Furthermore, we verify the method via a deformation measurement experiment. We find that the estimation method can afford an accuracy of 3% in cases where the glass sheet is symmetrically distributed, or asymmetrically distributed but with an asymmetry coefficient of less than 0.2. Finally, we find that the realistic boundary conditions, i.e. the film pressure in the groove and the edge deflection, greatly affect the estimation results, and an allowable measurement error to ensure adequate accuracy of the estimation is provided.

show abstract

Determination of Main Parameters of Air Floating Support System for Liquid Crystal Glass Substrate and Its Influence on Micro-Vibration of Glass Substrate

Wang,

Ma,

et al. 2024

Mechanisms and Machine Science

View full text Add to dashboard Cite

An Experimental Investigation on the Quasi-Static Flotation Transport of a Glass Substrate Using Vortex Bearing Elements

Cited by 4 publications

References 9 publications

Force characteristics and two-dimensional pressure fields of air flotation units with different numbers and distribution radii of orifices

Force characteristics and two-dimensional pressure fields of air flotation units with different numbers and distribution radii of orifices

Estimation of deformation for a glass sheet on a noncontact air conveyor with film pressure feedback

Determination of Main Parameters of Air Floating Support System for Liquid Crystal Glass Substrate and Its Influence on Micro-Vibration of Glass Substrate

Contact Info

Product

Resources

About