2019
DOI: 10.1177/0954406219875761
|View full text |Cite
|
Sign up to set email alerts
|

Force characteristics and two-dimensional pressure fields of air flotation units with different numbers and distribution radii of orifices

Abstract: Air flotation rails are widely used in semiconductor production lines for handling components such as liquid crystal glass substrates and wafers. In this study, the effects of the number and distribution radius of the orifices of the basic component (hereinafter referred to as air flotation unit) of the utilized air-suspension orbit were theoretically and experimentally investigated. The pressure distribution of the air flotation unit was first calculated using the Reynolds equation. The flotation forces and t… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3

Citation Types

0
3
0

Year Published

2022
2022
2024
2024

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(3 citation statements)
references
References 21 publications
0
3
0
Order By: Relevance
“…Chen X et al [5][6] proposed a non-contact air-film system with directional porous cushion, and studied the basic characteristics of pressure distribution and viscous force of air-film. Yu X et al [7][8] dominant pressure distribution considering the inclination angle and center height of inclined airflow film. The pressure field of inclined airflow film with different inclination angles and center height was experimentally measured, and the results were in good agreement with the theoretical results.…”
Section: Introductionmentioning
confidence: 99%
“…Chen X et al [5][6] proposed a non-contact air-film system with directional porous cushion, and studied the basic characteristics of pressure distribution and viscous force of air-film. Yu X et al [7][8] dominant pressure distribution considering the inclination angle and center height of inclined airflow film. The pressure field of inclined airflow film with different inclination angles and center height was experimentally measured, and the results were in good agreement with the theoretical results.…”
Section: Introductionmentioning
confidence: 99%
“…The Reynolds equation is used to model the air flow in the laminar flow region. 27 The mass flow conservation and the depression recovery factor [28][29][30] and the airflow characteristics in different regions can be coupled by using the pressure loss coefficient in the entrance. This model is used to predict the pressure distribution and the static characteristics of the bearings.…”
Section: Introductionmentioning
confidence: 99%
“…The air flow in the pressure depression region is modelled by coupling the inertial and viscous effects. The Reynolds equation is used to model the air flow in the laminar flow region 27 . The mass flow conservation and the depression recovery factor 28–30 and the airflow characteristics in different regions can be coupled by using the pressure loss coefficient in the entrance.…”
Section: Introductionmentioning
confidence: 99%