An Inductive Linear Displacement Sensor Based on Planar Coils

Tang, Qifu; Wu, Liang; Chen, Xihou; Peng, Dongming

doi:10.1109/jsen.2018.2839730

Cited by 19 publications

(6 citation statements)

References 24 publications

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“…Among them, the 0th, 1st, 179th, 180th, 181st, 360th, and 361th harmonic components are relatively large. According to Gou et al (2019), Tang et al (2018), and Wang (2017), the possible sources of errors of these harmonic components are analyzed, as shown in Table 1.…”

Section: Prototype Design and Experimentsmentioning

confidence: 99%

Parasitic time-grating angular displacement sensor for precision position measurement of turntable bearing

Wang

Qin

Chen

et al. 2023

Transactions of the Institute of Measurement and Control

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This paper proposes a parasitic time-grating angular displacement sensor for detecting the position of the turntable bearing. The sensor is mainly composed of probe, rotor, and supporting signal circuit. The probe consists of two separated measuring units on the left and right, and each measuring unit is composed of four sensing units with iron cores, excitation windings, and induction windings arranged according to specific rules. The rotor is made of sinusoidal isometric grooves based on the bearing end cover of the original turntable bearing. The signal processing circuit is used to filter, amplify, and compare the induction signal; meantime, it can generate the excitation signal. The high-frequency clock pulse signal is used as the measurement benchmark to realize the analysis of the position information of the induction signal. The structure and working principles of the sensor are presented in detail. Through the finite element method simulation, the feasibility of sensor scheme is verified, and the theoretical resolution of the prototype sensor is estimated to be about 1.33e−5. A sensor prototype is designed for testing, and the experimental results show that its accuracy can reach −0.003611° to 0.002583° in the range of [0°, 360°] after compensating the error point-by-point through the look-up table method.

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Section: Prototype Design and Experimentsmentioning

confidence: 99%

Parasitic time-grating angular displacement sensor for precision position measurement of turntable bearing

Wang

Qin

Chen

et al. 2023

Transactions of the Institute of Measurement and Control

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“…Moreover, the mechanical structure of inductive displacement sensor is close to the structure of AMB. Therefore, the inductive displacement sensor is more and more widely used in an AMB system [ 8 , 9 , 10 , 11 , 12 ].…”

Section: Introductionmentioning

confidence: 99%

Research on Coil Impedance of Self-Inductive Displacement Sensor Considering Core Eddy Current

Ren

2021

Sensors

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The inductive displacement sensor is widely used in active magnetic bearing (AMB) systems to detect rotor displacement in real time, and the performance of the sensor directly affects the performance of AMB. At present, most theoretical studies on the working principle of inductive displacement sensor are based on a traditional mathematical model, ignoring the influence of the core magnetic resistance and core eddy current, which will lead to a certain error between the theoretical analysis of the sensor output characteristics and the actual situation. In this regard, based on the theory of electromagnetic field and circuit, an improved theoretical model of the inductive sensor was established in this paper by introducing the complex permeability, by which the influence of core eddy current on magnetic field can be taken into account. In order to verify the improved model, an eight-pole radial self-inductive displacement sensor with an air gap of 1 mm was designed. Then the electromagnetic field of the designed sensor was simulated by a finite element software and the GW LCR-6100 measuring instrument was used to measure the changes of the inductance and resistance of the designed sensor core coils with the rotor displacement at 20–100 kHz. The results demonstrated that there is a good linear relationship between the impedance change of the sensor coils and the rotor displacement within the measurement range of −0.4 ~ +0.4 mm. At the same time, compared with the traditional model, the sensitivity of the improved theoretical model is closer to the results from FEM and experiment, and the accuracy of the sensitivity of the improved theoretical model can be approximately doubled, despite there are certain differences with the experimental situation. Therefore, the improved theoretical model considering complex permeability is of great significance for studying the influence of core eddy current on the coil impedance of sensor.

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“…The measurement principle of magnetic sensors uses the principle of electromagnetic induction, which has the advantages of low cost and strong anti-interference. However, the accuracy of magnetic sensors is not very high and they are easily affected by electromagnetic interference, so this kind of sensor is not suitable for high-precision computer numerical control machining [8]. Capacitive sensors, which utilize the relationship between the amount of charge and the displacement to determine the displacement measurement, have very high measurement accuracy.…”

Section: Introductionmentioning

confidence: 99%

Study of a high-precision displacement sensor based on a configured moving light field with uniform scanning

Fu¹,

Zhang²,

Zhu³

et al. 2020

Meas. Sci. Technol.

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A new measuring method for uniform scanning is proposed in this paper. This method uses a moving light field to establish the relationship between displacement and time, and the displacement is measured by the time difference of the traveling wave signal. The high-precision moving light field is configured by the time and spatial orthogonal modulation of the light intensity. Experiments verified the feasibility of the proposed sensor, and the primary measurement error components were summarized. Combined with the experimental results and the mathematical model, the error rule of the uniformity of the moving light field was analyzed in detail, and the optimization scheme of a differential structure was proposed. Finally, a differential structure sensor was fabricated with a pitch of 0.6 mm in the range of 120 mm. After optimizing the design and the error correction, the measurement accuracy reached ±0.4 µm with a 1 nm resolution within the range of 120 mm, and the results demonstrated that high-precision measurement was achieved using sub-millimeter periods.

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An Inductive Linear Displacement Sensor Based on Planar Coils

Cited by 19 publications

References 24 publications

Parasitic time-grating angular displacement sensor for precision position measurement of turntable bearing

Parasitic time-grating angular displacement sensor for precision position measurement of turntable bearing

Research on Coil Impedance of Self-Inductive Displacement Sensor Considering Core Eddy Current

Study of a high-precision displacement sensor based on a configured moving light field with uniform scanning

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