An integrated MEMS three-dimensional tactile sensor with large force range

Mei, Tao; Li, Wen J.; Yu, Gao; Chen, Yong; Ni, Lin; Chan, Ming Ho

doi:10.1016/s0924-4247(99)00261-7

Cited by 134 publications

(76 citation statements)

References 5 publications

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“…Many different approaches have been proposed to fabricate these sensors, most of them are based on piezoresistive (Engel et al 2006; Kane et al 2000;Mei et al 2000;Lomas et al 2004;Kim et al 2006;Wisitsoraat et al 2007; Shan et al 2005) or capacitive (Salo et al 2003;Leineweber et al 2000;Paschen et al 1998;Gray and Fearing 1996;Lee et al 2006; http://pressureprofile.com/products-robotouch) principles, and a few are based on optical (Hellard and Russell 2006) or piezoelectrical transduction (Dahiya et al 2007). Most of these sensors are made using technologies for Micro-ElectroMechanical Systems (MEMS) on silicon (Kane et al 2000;Lomas et al 2004; Salo et al 2003) or on polymers (Engel et al 2006;Kim et al 2006; Lee et al 2006).…”

Section: Introductionmentioning

confidence: 99%

Tactile sensors based on conductive polymers

Castellanos-Ramos

Navas-González

Macicior³

et al. 2009

SPIE Proceedings

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This paper presents results from a selection of tactile sensors that have been designed and fabricated. These sensors are based on a common approach that consists in placing a sheet of piezoresistive material on the top of a set of electrodes. We use a thin film of conductive polymer as the piezoresistive material. Specifically, a conductive water-based ink of this polymer is deposited by spin coating on a flexible plastic sheet, giving it a smooth, homogeneous and conducting thin film. The main interest in this procedure is that it is cheap and it allows the fabrication of flexible and low cost tactile sensors. In this work we present results from sensors made using two technologies. Firstly, we have used a flexible Printed Circuit Board (PCB) technology to fabricate the set of electrodes and addressing tracks. The result is a simple, flexible tactile sensor. In addition to these sensors on PCB, we have proposed, designed and fabricated sensors with screen printing technology. In this case, the set of electrodes and addressing tracks are made by printing an ink based on silver nanoparticles. The intense characterization provides us insights into the design of these tactile sensors.

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Section: Introductionmentioning

confidence: 99%

Tactile sensors based on conductive polymers

Castellanos-Ramos

Navas-González

Macicior³

et al. 2009

SPIE Proceedings

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“…Also, the integration density of organic-FET is much lower than the present silicon technology, and its long term reliability in force sensor applications has not yet been demonstrated. Silicon-MEMS tactile imagers, integrating micro pressure sensor array (Sugiyama et al, 1990) or micro force-sensor array, have been reported earlier ; (b); Kobayashi et al, 1990;Souza & Wise, 1997;Mei et al, 1999;Mei et al, 2000;Sato et al, 2003;Charlot et al, 2004). This type of sensors can reduce the number of electronic signal wires by integrated switching matrix fabricated using CMOS technology (Doelle et al, 2004).…”

Section: Introductionmentioning

confidence: 96%

Three-Dimensional Silicon Smart Tactile Imager Using Large Deformation of Swollen Diaphragm with Integrated Piezoresistor Pixel Circuits

Takao¹,

Ishida²

2008

Sensors: Focus on Tactile Force and Stress Sensors

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“…A wirefree tactile sensor based on transmitters/receivers [7], and a sensor based on micro coils for changing impedance by contact force [8], were housed in complex structures. Although compact sensors using microelectromechanical system (MEMS) can be manufactured, the surfaces of these sensors are minimally deformable [9][10][11][12] and cannot satisfy the first requirement as described above.…”

Section: Introductionmentioning

confidence: 99%

Acquisition of Contact Force and Slippage Using a Vision-Based Tactile Sensor with a Fluid-Type Touchpad for the Dexterous Handling of Robots

Ito¹,

Kim²,

Obinata³

2014

Adv Robot Autom

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This paper presents a new approach for estimating contact force and slippage by using a vision-based tactile sensor with a fluid-type touchpad for the dexterous handling of robots. The sensor consists of a CCD camera, LED lights, a transparent acrylic plate and a deformable touchpad. The sensor can obtain a variety of tactile information, such as the contact force, shape, contact region, position and orientation of an object in contact with the fluid-type touchpad. The previous method for measuring contact force requires extensive calculation; this paper proposes a new method based on lookup tables for measuring normal force, tangential force and moment, using a fluid-type touchpad. Additionally, we clarify the mechanism of slippage between a fluid-type touchpad and a contacted object. This mechanism is efficient for applying the proposed slippage estimation method to a fluid-type touchpad. The validation of the proposed methods is confirmed in the experimental results.

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An integrated MEMS three-dimensional tactile sensor with large force range

Cited by 134 publications

References 5 publications

Tactile sensors based on conductive polymers

Tactile sensors based on conductive polymers

Three-Dimensional Silicon Smart Tactile Imager Using Large Deformation of Swollen Diaphragm with Integrated Piezoresistor Pixel Circuits

Acquisition of Contact Force and Slippage Using a Vision-Based Tactile Sensor with a Fluid-Type Touchpad for the Dexterous Handling of Robots

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