2014
DOI: 10.1016/j.mee.2013.11.014
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An integrated planar magnetic micropump

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Cited by 40 publications
(17 citation statements)
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“…Externally-powered micropumps (e.g., piezoelectric micropumps [6,7], syringe pump [8,9,10], thermopneumatic micropump [11], magnetic micropump [12], and acoustic micropump [13,14]) use off-chip power such as electricity, mechanics, magnetism, and acoustic to drive the flow of microfluidic. Benefiting from the stability of the external components and control system, these micropumps can precisely control the speed of the microfluidic.…”
Section: Introductionmentioning
confidence: 99%
“…Externally-powered micropumps (e.g., piezoelectric micropumps [6,7], syringe pump [8,9,10], thermopneumatic micropump [11], magnetic micropump [12], and acoustic micropump [13,14]) use off-chip power such as electricity, mechanics, magnetism, and acoustic to drive the flow of microfluidic. Benefiting from the stability of the external components and control system, these micropumps can precisely control the speed of the microfluidic.…”
Section: Introductionmentioning
confidence: 99%
“…A thin sheet membrane is considered to be the key functional component in a mechanically driven micropump system, especially in microvalve [1][2][3][4][5][6] and valveless [7,8] micropump family. The external force acting on the membrane sheet pulls up or down the diaphragm to allow the fluid to move inside the channel.…”
Section: Introductionmentioning
confidence: 99%
“…These obstacles were already evident in an early phase of micropump research, which lead to the combination and integration of microfluidic flow sensors in the relevant range of nL/min to mL/min. Various flow sensor principles have since been established and used for combination with micropumps: thermal anemometers [ 21 , 22 , 23 ], differential pressure sensing [ 24 , 25 , 26 , 27 ], time-of-flight pressure sensing [ 28 ], ultrasonic transducers [ 29 ], optical [ 27 , 30 , 31 ] or capacitive [ 32 ] flank monitoring, capacitive [ 33 ] or impedance based [ 34 ] volume monitoring, Coriolis force [ 35 ], hotwire [ 36 ] and fluid drag force on cantilevers [ 37 , 38 ]. The flow monitoring methods were in part used to investigate micropump behavior and in part connected to a control unit in order to build closed-loop controlled systems to improve dosing accuracy.…”
Section: Introductionmentioning
confidence: 99%