2017
DOI: 10.3390/s17040755
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The Combination of Micro Diaphragm Pumps and Flow Sensors for Single Stroke Based Liquid Flow Control

Abstract: With the combination of micropumps and flow sensors, highly accurate and secure closed-loop controlled micro dosing systems for liquids are possible. Implementing a single stroke based control mode with piezoelectrically driven micro diaphragm pumps can provide a solution for dosing of volumes down to nanoliters or variable average flow rates in the range of nL/min to μL/min. However, sensor technologies feature a yet undetermined accuracy for measuring highly pulsatile micropump flow. Two miniaturizable in-li… Show more

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Cited by 24 publications
(11 citation statements)
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“…Other research activities pursue the application of smart (soft) electroactive materials [9,10] in peristaltic pumps. Furthermore, the combination of (micro)pumps with flow sensors is shown by Jenke et al [11] and others to ensure closed loop controlled micro-dosing. However, the degree of complexity is increasing by the implementation of the additional sensors.…”
Section: Introductionmentioning
confidence: 99%
“…Other research activities pursue the application of smart (soft) electroactive materials [9,10] in peristaltic pumps. Furthermore, the combination of (micro)pumps with flow sensors is shown by Jenke et al [11] and others to ensure closed loop controlled micro-dosing. However, the degree of complexity is increasing by the implementation of the additional sensors.…”
Section: Introductionmentioning
confidence: 99%
“…Piezoelectric pumps have the advantages of simple structure, high driving strength, easy miniaturization, no magnetic influence and low noise [ 1 , 2 , 3 , 4 , 5 ], etc. They can be applied to biomedical [ 6 , 7 , 8 ], microelectromechanical systems [ 9 , 10 ] and fuel cells [ 11 , 12 ]. However, the current output performance of piezoelectric pumps is generally low, which limits their application in many fields.…”
Section: Introductionmentioning
confidence: 99%
“…Piezoelectric pumps can be used in many fields (e.g., medicine, MEMS and fuel cells) for their advantages of simple structure, high actuation strength, easy miniaturization, no magnetic influence and low noise [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 ]. In recent years, with the continuous expansion of the application field of piezoelectric pumps, many new application fields that require piezoelectric pumps to have higher output performance have appeared.…”
Section: Introductionmentioning
confidence: 99%