2002
DOI: 10.1109/tepm.2002.807733
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An integrated process modeling methodology and module for sequential multilayered substrate fabrication using a coupled cure-thermal-stress analysis approach

Abstract: An integrated process modeling methodology using a coupled cure-thermal-stress analysis approach has been developed to determine the evolution of warpage and stresses during the sequential fabrication of high-density electronic packaging structures. The process modeling methodology has been demonstrated, for example, with a bi-layer structure consisting of a 3 mil (76. m) thick Vialux 81 photo-definable dry film (PDDF) polymer on a Silicon substrate. Extensive material characterization of the thermo-mechanical… Show more

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Cited by 31 publications
(13 citation statements)
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References 6 publications
(16 reference statements)
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“…The time-temperature superposition principle can be used to describe the linear viscoelastic behavior of many polymer materials [15]- [17]. The time-temperature superposition principle states that the effect of temperature on time-dependent mechanical behavior is equivalent to a stretching (or shrinkage) of real time for temperature above (or below) the reference temperature.…”
Section: Materials Characterization Of the Ncamentioning
confidence: 99%
“…The time-temperature superposition principle can be used to describe the linear viscoelastic behavior of many polymer materials [15]- [17]. The time-temperature superposition principle states that the effect of temperature on time-dependent mechanical behavior is equivalent to a stretching (or shrinkage) of real time for temperature above (or below) the reference temperature.…”
Section: Materials Characterization Of the Ncamentioning
confidence: 99%
“…20 shows some of the experimental data used to validate the predictive models. For more details on the models, experimental reliability tests, and material characterization techniques, please refer to [52]- [61].…”
Section: Mixed-signal Sop Reliabilitymentioning
confidence: 99%
“…3. A general-purpose integrated process modeling methodology and module has been developed [4] to monitor the evolution of stresses and warpage during the sequential fabrication of the multilayered SOP substrate. This methodology incorporates some fundamental aspects involved in the curing of dielectric polymers [5], [6] such as the curing mechanism, the cure-induced shrinkage, structure-property relationships, and cure process optimization.…”
Section: ) Digital Function Reliability: Upfront Process Optimizatiomentioning
confidence: 99%