An Investigation of Edge Bead Removal Width Variability, Effects and Process Control in Photolithographic Manufacturing

Reiter, Tamas; McCann, Michael; Connolly, James; Haughey, Sharon

doi:10.1109/tsm.2021.3129770

Cited by 3 publications

(1 citation statement)

References 17 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In the process of edge extraction, the "Canny" operator is used to obtain the contours and the gradient map of the line area respectively, and the edge contour of this area can be obtained [26]. The Hough transform is employed to identify line segments, from which the slot projection can be reconstructed [27]. Since the endpoints of the identified line segments are located on the edge of the image contour, it is natural that the identified lines are not the centre lines of the slot projection, and this causes a great error in the coordinate values calculation of the intersection point of the projection lines.…”

Section: Line Recognitionmentioning

confidence: 99%

Development and performance test of a novel solar tracking sensor

Lan

2023

Metrology and Measurement Systems

View full text Add to dashboard Cite

A new solar tracking sensor based on image recognition is proposed and designed to solve the problem of low accuracy of photoelectric tracking in photovoltaic power generation. The sensor can directly output its angular deviation from the sun, and its mechanical structure and working principle are analysed in detail. We use a high-precision camera to collect the image of the two slots on the projector surface and use the Hough transform to identify the image of the light seam. After obtaining the linear equation for the two slots, the coordinate of the intersection point is found, and the calculation of the solar altitude and azimuth can be realized. We have improved the Hough transform scheme by using the skeleton image of the slots instead of the edge image. The improvement of the scheme has been proved to effectively improve the detection accuracy. A calibration test board is used to test the sensor and experimental results show that the scheme can achieve the measurement of azimuth and altitude with the accuracy of be 0.05°, which can meet the detection accuracy requirements of the solar tracking in photovoltaic power generation and many other photoelectric tracking implementations.

show abstract

Section: Line Recognitionmentioning

confidence: 99%