An investigation on synthesis and characterization of superhard Cr-Zr-O coatings

Mohammadtaheri, M.; Li, Yanping; Corona-Gomez, J.; Yang, Q.

doi:10.1016/j.surfcoat.2019.06.102

Cited by 8 publications

(10 citation statements)

References 36 publications

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“…In most cases, the reported values were below 15 GPa [ 44 , 45 , 46 , 47 ]. Although the hardness here did not reach the super-hardness level of 40 GPa, the 22 GPa would be a good starting point to develop super-hard ALD Cr 2 O 3 -based films [ 10 ].…”

Section: Resultsmentioning

confidence: 99%

“…Chromium (III) oxide has been researched as a corrosion- and wear-resistant, mechanically protective hard coating, a component in glasses and glass ceramics, a cermet-type hard material or in other composites or as a sintering additive [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 ]. Some research has been focused on doped and pristine Cr 2 O 3 ’s optical, magnetic, catalytic or sensory properties [ 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 ].…”

Section: Introductionmentioning

confidence: 99%

“…A number of different physical and chemical methods have been employed to produce Cr 2 O 3 or the materials containing it. The physical techniques have included detonation and plasma spraying, different magnetron sputtering techniques and pulsed laser deposition [ 1 , 2 , 10 , 11 , 12 , 15 , 24 ]. The chemical techniques have included thermal decomposition of or co-precipitation from Cr(NO 3 ) 3 ∙9H 2 O, chemical vapor deposition (CVD) from CrCl 3 and H 2 O at 900 °C or CrO 3 and I 2 at 500 °C, metal–organic chemical vapor deposition from Cr(CO) 6 , laser-assisted CVD from O 2 and Cr(CO) 6 and atomic layer deposition (ALD) from CrO 2 Cl 2 and CH 3 OH precursors or from chromium acetyl acetonate and ozone [ 9 , 13 , 14 , 25 , 26 , 27 , 28 , 29 ].…”

Section: Introductionmentioning

confidence: 99%

“…The previous reports have indicated the Cr 2 O 3 thin films possess a high hardness of over 20 GPa [ 10 , 14 , 15 , 30 , 31 , 32 ]. In some conditions the processes produced chromia with lower hardness, even down to an 8–10 GPa level [ 14 ].…”

Section: Introductionmentioning

confidence: 99%

“…Reported values for the moduli range from 160 to about 290 GPa. The lower hardness and modulus values tend to appear in the amorphous chromia, but the crystalline counterparts have higher values [ 10 , 14 , 15 ]. It has been shown that Cr 2 O 3 , alloyed with other elements, could result in a super-hard material [ 10 ].…”

Section: Introductionmentioning

confidence: 99%

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Nanoindentation of Chromium Oxide Possessing Superior Hardness among Atomic-Layer-Deposited Oxides

et al. 2021

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Chromium (III) oxide is a technologically interesting material with attractive chemical, catalytic, magnetic and mechanical properties. It can be produced by different chemical and physical methods, for instance, by metal–organic chemical vapor deposition, thermal decomposition of chromium nitrate Cr(NO3)3 or ammonium dichromate (NH4)2Cr2O7, magnetron sputtering and atomic layer deposition. The latter method was used in the current work to deposit Cr2O3 thin films with thicknesses from 28 to 400 nm at deposition temperatures from 330 to 465 °C. The phase composition, crystallite size, hardness and modulus of elasticity were measured. The deposited Cr2O3 thin films had different structures from X-ray amorphous to crystalline α-Cr2O3 (eskolaite) structures. The averaged hardness of the films on SiO2 glass substrate varied from 12 to 22 GPa and the moduli were in the range of 76–180 GPa, as determined by nanoindentation. Lower values included some influence from a softer deposition substrate. The results indicate that Cr2O3 could be a promising material as a mechanically protective thin film applicable, for instance, in micro-electromechanical devices.

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