An LTP stitching procedure with compensation of instrument errors: Comparison of SOLEIL and ESRF results on strongly curved mirrors

Polack, F.; Thomasset, Muriel; Brochet, Sylvain; Rommeveaux, Amparo

doi:10.1016/j.nima.2009.10.166

Cited by 41 publications

(24 citation statements)

References 2 publications

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“…[6][7][8][9][10][11][12] In addition to the new and sophisticated fabrication technologies, which have resulted in significant progress in optical fabrication, a new level of performance in beamlines has become possible due to the development of dedicated high accuracy metrology methods and techniques for surface characterization in the laboratory before installation. [13][14][15][16][17][18][19][20][21][22][23][24][25][26][27] The operational scope of this metrology is being extended to the tuning and alignment of the optics in situ. [28][29][30][31][32][33][34] The uniqueness of the optics and the limited number of proficient vendors makes fabrication extremely time consuming and expensive.…”

Section: Introductionmentioning

confidence: 99%

Reliable before-fabrication forecasting of expected surface slope distributions for x-ray optics

Yashchuk

2012

Opt. Eng

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Numerical simulation of the performance of new beamlines and those under upgrade requires sophisticated and reliable information about the expected surface slope and height distributions of planned x-ray optics before they are fabricated. Obtaining such information should be based on the metrology data measured from existing mirrors that are made by the same vendor and technology; but, generally, with different sizes, slope and height rms variations. In this work, we demonstrate a method for highly reliable forecasting of the expected surface slope distributions of the prospective x-ray optics. The method is based on an autoregressive moving average (ARMA) modeling of the slope measurements with a limited number of parameters. With the found parameters of the ARMA model, the surface slope profile of an optic with the newly desired specification can reliably be forecast. We demonstrate the high accuracy of this type of forecasting by comparing the power spectral density distributions of the measured and forecast slope profiles.

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Section: Introductionmentioning

confidence: 99%

Reliable before-fabrication forecasting of expected surface slope distributions for x-ray optics

Yashchuk

2012

Opt. Eng

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“…These advantages keep this method as one of most important solution for the optical metrology in the future even though it has a disadvantage of being only a one-dimension measurement with lower test speeds. The sub-aperture interferometer stitching method is beginning to be used with LTP and SR-optics measurements (Assoufid et al, 2004;Polack et al, 2010) with linear scanning. It will extend to large optics the ability to perform 2-D and mid-spatial frequency testing.…”

Section: Pencil Beam Scanning Methods For Nano-accuracy Surface Figurementioning

confidence: 99%

Nano-Accuracy Surface Figure Metrology of Precision Optics

Qian¹,

Takacs²

2012

Modern Metrology Concerns

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“…16 The limiting factors for temperature stability achievable are the air exchange rate allowable from the point of view of air turbulence and cleanness, and the value and distribution of the heat from different sources, irremovable from the lab, including the instruments, instrumental electronics, and data acquisition and control (DAC) systems. Additionally, because of the typically very long time (many hours) of some measurements (for example, high accuracy surface slope profiling 22,23 and interferometric surface mapping with stitching 20,24 ), we are interested in a characteristic time for stability of hours and even days.…”

Section: General Requirements To the Design And Arrangement Of A Metrmentioning

confidence: 99%

Advanced environmental control as a key component in the development of ultrahigh accuracyex situmetrology for x-ray optics

et al. 2015

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Abstract. The advent of fully coherent free-electron laser and diffraction-limited synchrotron radiation storage ring sources of x-rays is catalyzing the development of new ultrahigh accuracy metrology methods. To fully exploit these sources, metrology needs to be capable of determining the figure of an optical element with subnanometer height accuracy. The major limiting factors of the current absolute accuracy of ex situ metrology are drift errors due to temporal instabilities of the lab's environmental conditions and systematic errors inherent to the metrology instruments. Here, we discuss in detail work at the Advanced Light Source X-Ray Optics Laboratory on building of advanced environmental control that is a key component in the development of ultrahigh accuracy ex situ metrology for x-ray optics. By a few examples, we show how the improvement of the environmental conditions in the lab allows us to significantly gain efficiency in performing ex situ metrology with high-quality x-ray mirrors. The developed concepts and approaches, included in the design of the new X-Ray Optics Laboratory, are described in detail. These data are essential for construction and successful operation of a modern metrology facility for x-ray optics, as well as high-precision measurements in many fields of experimental physics. © The Authors. Published by SPIE under a Creative CommonsAttribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requiresfull attribution of the original publication, including its DOI.

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An LTP stitching procedure with compensation of instrument errors: Comparison of SOLEIL and ESRF results on strongly curved mirrors

Cited by 41 publications

References 2 publications

Reliable before-fabrication forecasting of expected surface slope distributions for x-ray optics

Reliable before-fabrication forecasting of expected surface slope distributions for x-ray optics

Nano-Accuracy Surface Figure Metrology of Precision Optics

Advanced environmental control as a key component in the development of ultrahigh accuracyex situmetrology for x-ray optics

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