An optical fiber-taper probe for wafer-scale microphotonic device characterization

Michael, C. P.; Borselli, Matthew; Johnson, Thomas J.; Chrystal, C.; Painter, Oskar

doi:10.1364/oe.15.004745

Cited by 110 publications

(91 citation statements)

References 29 publications

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“…16 A broadband cavity transmission spectrum is shown in Fig. 3͑a͒, with the first and second order optical cavity modes separated by roughly by 10 nm, in agreement with simulations.…”

supporting

confidence: 79%

Optomechanics in an ultrahigh-Q two-dimensional photonic crystal cavity

Alegre

Winger

Painter

2010

Applied Physics Letters

135

107

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We demonstrate an ultrahigh-Q slotted two-dimensional photonic crystal cavity capable of obtaining strong interaction between the internal light field and the mechanical motion of the slotted structure. The measured optical quality factor is Q = 1.2ϫ 10 6 for a cavity with an effective modal volume of V eff = 0.04͑ ͒ 3 . Optical transduction of the thermal motion of the fundamental in-plane mechanical resonance of the structure ͑ m = 151 MHz͒ is performed, from which a zero-point motion optomechanical coupling rate of g ‫ء‬ / 2 = 320 kHz is inferred. Dynamical back-action of the optical field on the mechanical motion, resulting in cooling and amplication of the mechanical motion, is also demonstrated. © 2010 American Institute of Physics. ͓doi:10.1063/1.3507288͔The strength of the interaction between light and matter, which is fundamental to many applications in nonlinear and quantum optics, depends on the ability to create a large optical energy density, either through increased photon number or photon localization. This may be achieved by creating optical cavities with large quality factors Q and simultaneously small modal volumes V eff . The mode volume V eff in particular can be decreased through the introduction of slots, increasing the electric field intensity in low-index regions of the device. As such, slotted photonic crystal cavities 1 and waveguides 2 have been previously proposed and applied to create highly sensitive detectors of motion 3,4 and molecules. 5 They have also more recently been studied in the context of Purcell enhancement of spontaneous emission from embedded quantum dots. 6 In the canonical optomechanical system, consisting of a Fabry-Perot resonator with an oscillating end-mirror, 7 the radiation pressure force per cavity photon is given by បgwhere o is the cavity resonance frequency, x is the position of the end mirror, and L OM is approximately equal to the physical length of the cavity. In the quantum realm, one is interested in the zero-point motion coupling rate, which is given by g = g OM ͱ ប / 2m eff m , where m eff is the effective motional mass and m is the mechanical resonance frequency. Large optomechanical coupling, approaching g OM = o / , has recently been realized in several different guided wave optical cavity geometries utilizing nanoscale slots. 3,4,8 In this work we design, fabricate, and measure the optomechanical properties of a slotted twodimensional ͑2D͒ photonic crystal cavity formed in a Silicon membrane. Due to the strong optical confinement provided by a sub-100 nm slot and a 2D photonic band gap, this cavity structure is demonstrated to have an optical quality factor Q Ͼ 10 6 and a coupling rate of g / 2 = 320 kHz.A common approach to forming photonic crystal optical circuits is to etch a pattern of holes into a thin dielectric film such as the top Silicon device layer in a Silicon-On-Insulator ͑SOI͒ microchip. An effective means of forming resonant cavities in such quasi-2D slab photonic crystal structures is to weakly modulate the properties of a line-de...

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“…16 A broadband cavity transmission spectrum is shown in Fig. 3͑a͒, with the first and second order optical cavity modes separated by roughly by 10 nm, in agreement with simulations.…”

supporting

confidence: 79%

Optomechanics in an ultrahigh-Q two-dimensional photonic crystal cavity

Alegre

Winger

Painter

2010

Applied Physics Letters

135

107

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“…The electrical circuit is then defined in a ZEP lift-off process using an aligned electron beam lithography step, followed by deposition of chromium (5 nm) and gold (50 nm) through optical transmission measurements using a tunable external cavity semiconductor diode laser (Newfocus Velocity series) whose frequency tuning is calibrated with an unbalanced fiber Mach-Zender interferometer. Optical coupling to a given device is achieved via a tapered and dimpled optical fiber probe, which when placed in near-field of the photonic crystal cavity allows for evanescent coupling of light between the fiber and cavity [25]. An optical transmission scan, shown in Fig.…”

Section: Design and Fabricationmentioning

confidence: 99%

Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity

Pitanti¹,

Fink²,

Safavi-Naeini³

et al. 2015

Opt. Express

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Abstract:We fabricate and characterize a microscale silicon opto-electromechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining a silicon surface quality necessary for minimizing optical loss. Using the sensitive optical read-out of the photonic crystal cavity, we characterize the linear and nonlinear capacitive coupling to the fundamental ω m /2π = 63 MHz in-plane flexural motion of the structure, showing that the large electromechanical coupling in such devices may be suitable for realizing efficient microwave-to-optical signal conversion. References and links 1. N. Yazdi, F. Avazi, and K. Najafi, "Micromachined inertial sensors," Proc. IEEE 86, 1640IEEE 86, -1659IEEE 86, (1998. 2. T. Tajima, T. Nishiguchi, S. Chiba, A. Morita, M. Abe, K. Tanioka, N. Saito, and M. Esashi, "High-performance ultra-small single crystalline silicon microphone of an integrated structure," Microelectron. Eng. 67-68, 508-519 (2003).

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“…In the past two decades, there has been growing interest in photonic devices based on Si-compatible materials (Kimerling et al, 2004;Jalali & Fathpour, 2006) in the field both of the optical telecommunications and of the optical interconnects. In this contest, tremendous progresses in the technological processes based on the use silicon-on insulator (SOI) substrates have allowed to obtain reliable and effectiveness full complementary metal-oxide semiconductor (CMOS) compatible optical components such as, low loss waveguides, high-Q resonators, high speed modulators, couplers, and optically pumped lasers (Rowe et al, 2007 ;Vivien et al, 2006 ;Xu et al, 2007 ;Michael et al, 2007;Liu et al, 2007 ;Liu et al, 2006). All these devices have been developed to operate in the wavelength range from C optical band (1528-1561 nm) to L optical band (1561-1620 nm).…”

Section: Introductionmentioning

confidence: 99%