An Optical MEMS Accelerometer Based on a Two-Dimensional Photonic Crystal Add-Drop Filter

Sheikhaleh, Arash; Abedi, Kambiz; Jafari, Kian

doi:10.1109/jlt.2017.2706140

Cited by 47 publications

(22 citation statements)

References 23 publications

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“…Such accelerometers are usually based on a micro-or nano-meter displacement of a holder. Several methods have been presented so far to measure the displacement of seismic mass, such as capacitive [72,73], resistive piezo [74], piezoelectric [75], and optical [76,77]. The capacitive sensing technology is very attractive in the applications because of its ease of implementation compared with other sensing technologies.…”

Section: Photonic Sensorsmentioning

confidence: 99%

“…Furthermore, the methods based on optical measurements are more reliable due to their immunity against electromagnetic interferences (EMI), which makes them suitable tools in EMI contaminated environments [80]. The operational principle of optical MEMS accelerometers is based on the modulation of lightwave properties such as intensity, and phase and wavelength modulation under applied acceleration [58,76,81]. Nie et al [82] proposed an optical MEMS accelerometer sensor based on a one-dimensional photonic crystals wavelength modulation system with a focus on optimizing the sensitivity of the high-frequency device.…”

Section: Photonic Sensorsmentioning

confidence: 99%

“…The optical signal of the laser source is launched into the input waveguide of the AOS, then it is selected by the central resonant nanocavity and finally coupled to the output. Sheikhaleh et al [76] presented an optical MEMS accelerometer using an add-drop filter (ADF) in the microstructured PhC. In this device, when an acceleration is applied to the proof mass and it is along the positive y-direction (+y), the holder is displaced in the opposite y-direction (-y).…”

Section: Proposed All-optical Sensormentioning

confidence: 99%

“…In this device, when an acceleration is applied to the proof mass and it is along the positive y-direction (+y), the holder is displaced in the opposite y-direction (-y). In the proposed AOF in [76], it is not possible to detect displacement along the x-axis. But the proposed AOS, shown in Fig.…”

Section: Proposed All-optical Sensormentioning

confidence: 99%

See 3 more Smart Citations

A Novel All-Optical Sensor Design Based on a Tunable Resonant Nanocavity in Photonic Crystal Microstructure Applicable in MEMS Accelerometers

et al. 2020

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In view of the large scientific and technical interest in the MEMS accelerometer sensor and the limitations of capacitive, resistive piezo, and piezoelectric methods, we focus on the measurement of the seismic mass displacement using a novel design of the all-optical sensor (AOS). The proposed AOS consists of two waveguides and a ring resonator in a two-dimensional rod-based photonic crystal (PhC) microstructure, and a holder which connects the central rod of a nanocavity to a proof mass. The photonic band structure of the AOS is calculated with the plane-wave expansion approach for TE and TM polarization modes, and the light wave propagation inside the sensor is analyzed by solving Maxwell’s equations using the finite-difference time-domain method. The results of our simulations demonstrate that the fundamental PhC has a free spectral range of about 730 nm covering the optical communication wavelength-bands. Simulations also show that the AOS has the resonant peak of 0.8 at 1.644µm, quality factor of 3288, full width at half maximum of 0.5nm, and figure of merit of 0.97. Furthermore, for the maximum 200nm nanocavity displacements in the x- or y-direction, the resonant wavelengths shift to 1.618µm and 1.547µm, respectively. We also calculate all characteristics of the nanocavity displacement in positive and negative directions of the x-axis and y-axis. The small area of 104.35 µm2 and short propagation time of the AOS make it an interesting sensor for various applications, especially in the vehicle navigation systems and aviation safety tools.

show abstract

Section: Photonic Sensorsmentioning

confidence: 99%

Section: Photonic Sensorsmentioning

confidence: 99%

Section: Proposed All-optical Sensormentioning

confidence: 99%

Section: Proposed All-optical Sensormentioning

confidence: 99%

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A Novel All-Optical Sensor Design Based on a Tunable Resonant Nanocavity in Photonic Crystal Microstructure Applicable in MEMS Accelerometers

et al. 2020

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show abstract

“…Among the various sensing technologies used in the MEMS accelerometers, the capacitive-based accelerometers are the most popular ones, due to their simplicity and straightforward fabrication process; however, these MEMS devices have also shown some drawbacks such as curling effect [16] and parasitic capacitance [17]. A promising method to overcome these disadvantages is to use an optical sensing technology instead [18][19][20][21][22]. In general, these optical motion sensors are more sensitive and have higher resolution compared to capacitive ones [22].…”

Section: Introductionmentioning

confidence: 99%

Optical MEMS accelerometer sensor relying on a micro‐ring resonator and an elliptical disk

Shotorban

Jafari

Abedi

2019

IET Circuits, Devices & Systems

Self Cite

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Here, a novel optical micro-electro-mechanical systems (MEMS) accelerometer sensor based on a micro-ring resonator and an elliptical disk is proposed. The designed optical MEMS accelerometer is then analysed to obtain its functional characteristics. The proposed optical MEMS sensor presents an optical sensitivity of 0.0025 nm/g, a mechanical sensitivity of 1.56 nm/g, a linear measurement range of ±22 g, a first resonance frequency of 13.02 kHz, and a footprint of 34 m × 50 m. Furthermore, the achieved functional characteristics of the proposed accelerometer are compared to several recent contributions in the related field. According to this comparison study, the present optical MEMS accelerometer can be a suitable device for many applications ranging from consumer electronics to inertial measurement units.

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Improvement and optimization of high-precision accelerometer based on first-order diffraction using single-layer grating

Wang

Huang²,

Cheng³

2022

Opt Rev

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An Optical MEMS Accelerometer Based on a Two-Dimensional Photonic Crystal Add-Drop Filter

Cited by 47 publications

References 23 publications

A Novel All-Optical Sensor Design Based on a Tunable Resonant Nanocavity in Photonic Crystal Microstructure Applicable in MEMS Accelerometers

A Novel All-Optical Sensor Design Based on a Tunable Resonant Nanocavity in Photonic Crystal Microstructure Applicable in MEMS Accelerometers

Optical MEMS accelerometer sensor relying on a micro‐ring resonator and an elliptical disk

Improvement and optimization of high-precision accelerometer based on first-order diffraction using single-layer grating

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