An optical probe for local ion temperature measurements in a plasma

Kiss’ovski, Zh; Bohmeyer, W.; Fußmann, G.

doi:10.1002/ctpp.200410061

Cited by 4 publications

(2 citation statements)

References 8 publications

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“…Various approaches have been developed in the past to deal with the challenge of obtaining spatially resolved emission profiles in low-pressure plasmas. To circumvent the problem of line-of-sight integration, so-called optical probes for spatially resolved emission spectroscopy have been developed [28][29][30][31][32][33]. These probes consist of a ceramic tube inserted into the plasma and moved along the plasma cross section.…”

Section: Introductionmentioning

confidence: 99%

“…Firstly, in order to collect a sufficient amount of light, the length between the screen and the probe end cannot be made too small and resolution is limited. Secondly, a certain amount of light from regions outside the defined volume is scattered on the screen surface and can lead to distortion of the result [31]. Finally, the screen represents a recombining surface for both charged particles and radicals and can distort the emission in the observed region.…”

Section: Introductionmentioning

confidence: 99%

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A novel probe for spatially resolved emission spectroscopy in plasmas

Du¹,

Çelik

Luggenhölscher³

et al. 2010

Plasma Sources Sci. Technol.

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A novel diagnostic device is developed to obtain spatially resolved emission profiles in plasmas. A ceramic tube is immersed into the plasma and moved along its longitudinal axis.A lens located at the other end of the ceramic tube images light onto an optical fiber which guides the light to a detector. In the case that the plasma emission is detected within a negligible solid angle, simple differentiation of the measured signal yields spatially resolved emission profiles. For non-negligible solid angles, spatial resolution can still be obtained by a more sophisticated evaluation. The design of the probe and the underlying theory are presented. The arrangement of the optics is analyzed in detail. Measurements in an inductively coupled radio-frequency (RF) hydrogen discharge in a GEC cell at different RF powers, neutral gas pressures and axial probe positions are performed. The obtained radial emission profiles of the Balmer-α line exhibit a torus-like structure which reflects the structure of the induced electrical field of the antenna. Furthermore, the transition from H to E mode at lower powers is observed.Based on a corona equilibrium model excitation rates are calculated out of electron energy distribution functions measured by an RF compensated Langmuir probe. A comparison of measured emission profiles with calculated excitation rate profiles shows very good agreement. Integrated emission profiles obtained by camera images are Abel inverted and compared with profiles obtained by the optical probe. The comparison demonstrates the advantage of the optical probe.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A novel probe for spatially resolved emission spectroscopy in plasmas

Du¹,

Çelik

Luggenhölscher³

et al. 2010

Plasma Sources Sci. Technol.

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Ion sensitive probe measurement in the linear plasma device PSI-2

Ezumi

Kiss’ovski

Bohmeyer

et al. 2005

Journal of Nuclear Materials

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The effects of plasma density and magnetic field on ion temperature and drift velocity in a LaB6 direct current plasma

et al. 2009

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In a LaB6 direct current plasma, parallel and perpendicular ion temperatures (Ti∥ and Ti⊥) were measured as a function of plasma density and magnetic field by a laser-induced fluorescence technique. In order to study the impacts of magnetic field and plasma density on ion temperature and drift velocity, the plasma density was controlled by a magnetic field and discharge current under the following plasma conditions: The magnetic field intensity at the measurement position, BD, was 186–405 G; discharge voltage, Vdis, was 29.9–32.1 V; discharge current, Idis, was 10–22 A; neutral pressures, Pn, were 130 mTorr (in the source region) and 2.2 mTorr (at diagnostic region); plasma density, np, was (2–8)×1012 cm−3; and electron temperature, Te, was ∼2.6 eV. Parallel ion temperature (Ti∥), perpendicular ion temperature (Ti⊥), and drift velocity, vD∥ (or drift kinetic energy, ED) all increase as a function of BD and Idis, such that the total ion energy, Et (=Ti⊥+Ti∥+ED), increases as a function of BD and Idis. From the relations of Ti∥, Ti⊥, and vD∥ to np, ion temperature and drift velocity were observed to be strongly depend on plasma density. In consideration of the collision time scales, ion gyrofrequency, and time of flight from the source to the measurement position, the dominant process for ion heating was observed to be the electron-ion collisions, although the magnetic field and ion-neutral collisions contribute to ion temperature anisotropy.

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An optical probe for local ion temperature measurements in a plasma

Cited by 4 publications

References 8 publications

A novel probe for spatially resolved emission spectroscopy in plasmas

A novel probe for spatially resolved emission spectroscopy in plasmas

Ion sensitive probe measurement in the linear plasma device PSI-2

The effects of plasma density and magnetic field on ion temperature and drift velocity in a LaB6 direct current plasma

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