“…where Du is the rotation angle. After coordinate transformation, the coordinates of various pixels of the chip calibration reference mark image in the standard image can be calculated and substituted in sub-pixel interpolation (Lin and Yang, 2014;Cho et al, 2005;Lin et al, 2007), as shown in Figure 3. The gray level of the reference standard image corresponding to the chip calibration reference mark image position can be obtained, where GI is the standard image (Golden Image), with its coordinate position expressed as (GI xi , GI yi ), the gray level of the standard image; RE is the Reference Image, with its coordinate position expressed as (RE x , RE y ), the gray level of the reference standard image.…”