An overlapping electrode buried channel CCD

Abstract

Newport Beach, C a l i f o r n i a I n t r o d u c t i o n Although t h e c o n c e p t o f t h e b u r i e d channel CCD (1) o f f e r s many d i s t i n c t advantages over surface channel devices, it is necessary t o develop a d e v i c e s t r u c t u r e which can b e r e l i a b l y f a b r icated. I n t h i s p a p e r s u c h a device i s presented and t e s t results are given which d e m o n s t r a t e t h a t h i g h t r