2014
DOI: 10.1007/s11664-014-3332-x
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An RDL UBM Structural Design for Solving Ultralow-K Delamination Problem of Cu Pillar Bump Flip Chip BGA Packaging

Abstract: Copper (Cu) pillar bumps tend to induce high thermal-mechanical stress during environmental tests and fabrication processes due to the high hardness of Cu, especially when applied with an ultralow-K (ULK) chip. A previous experiment showed that interfacial delamination was often observed in the ULK layers of conventional Cu pillar bump-type flip chip ball grid array (FCBGA) packages under thermal cycling, where under bump metallurgy (UBM) layers directly sit on the metal pads of silicon chips (herein termed ''… Show more

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Cited by 19 publications
(5 citation statements)
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“…In addition, since the chip is inverted on the solder bumps, thermally conductive silicone grease can be painted on the back of the chip to enhance the heat dissipation capability. Furthermore, removing wire bonding is possible to achieve a higher density layout by redistributing layer (RDL) on the substrate without taking up space on the chip surface [ 13 ]. Hence, the distance between the chip and the substrate is shortened, the time delay of signal transmission is reduced, and the chip performance is improved [ 14 ].…”
Section: Models and Simulationmentioning
confidence: 99%
“…In addition, since the chip is inverted on the solder bumps, thermally conductive silicone grease can be painted on the back of the chip to enhance the heat dissipation capability. Furthermore, removing wire bonding is possible to achieve a higher density layout by redistributing layer (RDL) on the substrate without taking up space on the chip surface [ 13 ]. Hence, the distance between the chip and the substrate is shortened, the time delay of signal transmission is reduced, and the chip performance is improved [ 14 ].…”
Section: Models and Simulationmentioning
confidence: 99%
“…(11) Furthermore, the effective Young's modulus (E) and Poisson's ratio (ν) of the Cu 7 In 3 polycrystalline aggregate can be estimated from the calculated polycrystalline bulk and shear moduli, as follows, 9 3 Table 1 presents the predicted bulk modulus, shear modulus, Young's modulus and Poisson's ratio of polycrystalline Cu 7 In 3 . The present calculations agree fairly well with the literature theoretical data [35].…”
Section: A Mechanical Properties and Characteristicsmentioning
confidence: 99%
“…Nevertheless, many critical technical challenges remain to be solved before In-based solders can be successfully implemented. For instance, in flip chip (FC) packaging technology, under bump metallurgy (UBM) that generally involves wetting/seeding, diffusion barrier, adhesion and passivation layers has been commonly exploited as a solid base material for subsequent solder bumping process [7][8][9]. Among the stacked layers in UBM, the seeding layer normally comprises a few micrometer (μm) thick electro-deposited copper.…”
Section: Introductionmentioning
confidence: 99%
“…For example, interfacial delamination is a problem when Cu pillar bumping is applied on ultralow-K chip. Chen et al (2014) have proposed to use redistribution layer technology to relocate under bump metallurgy pads with aim to reduce the thermalmechanical stress of ultralow-K chip. FEA model was conducted by them to determine the reduction of thermalmechanical stress.…”
Section: Introductionmentioning
confidence: 99%