2007
DOI: 10.1007/s10544-007-9070-6
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An ultra-thin PDMS membrane as a bio/micro–nano interface: fabrication and characterization

Abstract: We report a method for making ultra-thin PDMS membrane devices. Freely suspended membranes as thin as 70 nm have been fabricated. Bulging tests were performed with a custom built fluidic cell to characterize large circular membranes. The fluidic cell allows the media (such as air or water) to wet one side of the membrane while maintaining the other side dry. Pressure was applied to the membrane via a liquid manometer through the fluidic cell. The resulting load-deflection curves show membranes that are extreme… Show more

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Cited by 171 publications
(140 citation statements)
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“…PDMS has become the preferred material for biomedical electrons and microscale fluid devices due to the following advantages: (a) low production cost compared to traditional MEMS substrate materials such as silicon or glass; (b) optical transparency (transparent for a wavelength range of 400-700 nm); (c) biocompatibility; and (d) easy bonding to itself or other substrates. [10][11][12][13][14] In addition to those advantages, the rubber elastic properties of PDMS have become versatile tools for microfluidic devices and have been used in micro-flow cytometry, peristaltic pumping and mixing, microvalves, and portable immunosensing systems. [15][16][17][18] A highly flexible PDMS chip also was used to maintain chemostatic conditions for bacterial and yeast colony growth.…”
Section: Introductionmentioning
confidence: 99%
“…PDMS has become the preferred material for biomedical electrons and microscale fluid devices due to the following advantages: (a) low production cost compared to traditional MEMS substrate materials such as silicon or glass; (b) optical transparency (transparent for a wavelength range of 400-700 nm); (c) biocompatibility; and (d) easy bonding to itself or other substrates. [10][11][12][13][14] In addition to those advantages, the rubber elastic properties of PDMS have become versatile tools for microfluidic devices and have been used in micro-flow cytometry, peristaltic pumping and mixing, microvalves, and portable immunosensing systems. [15][16][17][18] A highly flexible PDMS chip also was used to maintain chemostatic conditions for bacterial and yeast colony growth.…”
Section: Introductionmentioning
confidence: 99%
“…The STP method enables fabrication of NW devices on adhesive substrates, such as PDMS and many types of adhesive tapes, by peeling off prefabricated NW devices from a donor Si wafer by using the adhesive receiver substrates. The STP method was first demonstrated with PDMS as the receiver substrate because PDMS is commonly used for microfluidic and biological applications because of its simplicity in fabrication, excellent elasticity, and biocompatibility (24). The basic steps of transferring NW devices onto PDMS by using the STP method are summarized in Fig.…”
mentioning
confidence: 99%
“…그리고 Silwet L-77은 표면에너지를 높여주는 계 면활성제로 사용되며 주로 PDMS와 혼합하여 반영구적으로 표면물 성을 개질하는데 사용된다 [19] . 을 낮추게 된다 [20] . …”
Section: (A-d)와unclassified