An ultraminiature CMOS pressure sensor for a multiplexed cardiovascular catheter

Ji, J.; Cho, S.T.; Zhang, Y.; Najafi, K.; Wise, K.D.

doi:10.1109/16.158797

Cited by 50 publications

(20 citation statements)

References 9 publications

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“…Prior to contact of the two substrates, their surfaces are adequately cleaned to remove any particle that can inhibit their good contact. Bulk micromachining combined with anodic bonding has been successfully used for the realization of medical capacitive pressure sensors by a couple of research groups (35,36). In the process developed at the University of Michigan, boron etch-stop techniques and silicon-glass anodic bonding is used to fabricate a capacitive pressure sensor.…”

Section: Bulk Micromachining Technologiesmentioning

confidence: 99%

Capacitive Microsensors for Biomedical Applications

Tsoukalas¹,

Chatzandroulis²,

Goustouridis³

2006

Encyclopedia of Medical Devices and Instrumentation

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The use of reliable, high performance miniature sensors in the medical field is of growing importance for patient health monitoring. Batch sensor fabrication, as this has been introduced by Integrated Circuit (IC) manufacturing, is an efficient way to produce silicon sensors with desirable characteristics. Since microsensors combine small size with electrical and mechanical principles of operation they constitute together with microactuators what is usually called Microelectromechanical Systems (MEMS). These components are mainly made from silicon and other related materials to explore existing know‐how and infrastructure of silicon technology. All of the above factors have allowed for fast growth of the microsensor field during the last years. This article focuses on physical microsensors used in the medical field that are based on the capacitive approach.

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Section: Bulk Micromachining Technologiesmentioning

confidence: 99%

Capacitive Microsensors for Biomedical Applications

Tsoukalas¹,

Chatzandroulis²,

Goustouridis³

2006

Encyclopedia of Medical Devices and Instrumentation

View full text Add to dashboard Cite

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“…The lower photographs show the cortical implant configuration and a 16-site penetrating electrode array [65]. cardiovascular measurements [8,[74][75][76], and recently reported devices have been merged with wireless technology to allow wireless pressure/flow sensing in the carotid arteries ( Fig. 7) [77].…”

Section: Wireless Integrated Microsystems (Wims)mentioning

confidence: 99%

Integrated sensors, MEMS, and microsystems: Reflections on a fantastic voyage

Wise

2007

Sensors and Actuators A: Physical

101

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“…One of the indirect methods of measuring flow utilizes a multisite pressure measurement system [7]. There are three conditions that must be met in order to use pressure to assess arterial flow [8].…”

Section: Introductionmentioning

confidence: 99%

A Fully Integrated Multisite Pressure Sensor for Wireless Arterial Flow Characterization

DeHennis

Wise

2006

J. Microelectromech. Syst.

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This paper presents a fully integrated battery-free sensing system that uses a two-site wireless pressure measurement for the detection of arterial stenosis. The remotely powered system uses a backscatter-modulated passive-telemetry interface and transmits sensor as well as reference information to an external system. The monolithic process used to realize the system integrates a 3 m BiCMOS circuit with silicon-on-glass absolute pressure sensors and an on-chip antenna. The wireless sensor interface consumes 340 W and uses capacitance-to-frequency conversion for readout of the vacuum-sealed pressure transducers. The integrated device has a 200 m profile and a volume of 2 mm 3 . The system can sense a reduction in flow of 13%, corresponding to a differential pressure of 3 mmHg.[1675]Index Terms-Implantable sensor, monolithic integration, on-chip antenna, pressure sensor, wireless telemetry.

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An ultraminiature CMOS pressure sensor for a multiplexed cardiovascular catheter

Cited by 50 publications

References 9 publications

Capacitive Microsensors for Biomedical Applications

Capacitive Microsensors for Biomedical Applications

Integrated sensors, MEMS, and microsystems: Reflections on a fantastic voyage

A Fully Integrated Multisite Pressure Sensor for Wireless Arterial Flow Characterization

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