Integrated sensors, MEMS, and microsystems: Reflections on a fantastic voyage

Wise, K.D.

doi:10.1016/j.sna.2007.02.013

Cited by 101 publications

(60 citation statements)

References 70 publications

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“…Silicon load cells have extremely significant applications in biomedical and industrial segments requiring precise and reliable force measurements. Several kinds of Si load cells based on MEMS technology have been developed while a lot more to come for a variety of application segments (Wise 2007). Some MEMS based force transducers have been designed and developed in-house and their characterization is underway (Fig.…”

Section: In-house Investigations Of Mems Based Force Transducersmentioning

confidence: 99%

Force transducers – A review of design and metrological issues

Kumar¹,

Maji²

2016

10.5267/j.esm

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The present work reports the retrospective investigation of force transducers widely used for force measurement related applications in variety of areas. The paper discusses the salient features of different types of force transducers along with their design and metrological features. The force transducers are covered from the analogue type to modern force transducers. The paper attempts to discuss the limitations of the different types of force transducers.

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Section: In-house Investigations Of Mems Based Force Transducersmentioning

confidence: 99%

Force transducers – A review of design and metrological issues

Kumar¹,

Maji²

2016

10.5267/j.esm

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“…1 The symbol ✓ indicates that the manufacturing and assembly process for the reported device can be integrated in a standard IC process flow, whereas the symbol ✗ indicates that some of the steps required for production (including assembly with permanent magnets) prevent the integration of the manufacturing process within a standard IC fabrication flow. 2 The symbol ✓ indicates that the reported device incorporates a latching mechanism of some sort that enables the actuated state to be held with no constant power dissipation, whereas the symbol ✗ indicates that the device consumes a constant power to hold the actuated state.…”

Section: Summary Of the Reviewed Devices: Classification By Smart Powmentioning

confidence: 99%

“…This development has mostly been driven by the goals of producing devices that can achieve higher performance at a lower cost and with reduced footprint [1][2][3][4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Integrated Magnetic MEMS Relays: Status of the Technology

2014

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Abstract:The development and application of magnetic technologies employing microfabricated magnetic structures for the production of switching components has generated enormous interest in the scientific and industrial communities over the last decade. Magnetic actuation offers many benefits when compared to other schemes for microelectromechanical systems (MEMS), including the generation of forces that have higher magnitude and longer range. Magnetic actuation can be achieved using different excitation sources, which create challenges related to the integration with other technologies, such as CMOS (Complementary Metal Oxide Semiconductor), and the requirement to reduce power consumption. Novel designs and technologies are therefore sought to enable the use of magnetic switching architectures in integrated MEMS devices, without incurring excessive energy consumption. This article reviews the status of magnetic MEMS technology and presents devices recently developed by various research groups, with key focuses on integrability and effective power management, in addition to the ability to integrate the technology with other microelectronic fabrication processes.

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“…These columns are intended to portable gas chromatograph systems, the development of which in the past four decades led to several innovations, not only in columns, but also in detectors; however, some difficulties still remain, specially regarding the integration of each part to the whole equipment (15,16) . The column is the core of a chromatograph and its miniaturization produced an enormous variety of layouts, but the use of a planar spiral (12,(17)(18)(19) is not uncommon, as explained later, or a serpentine shape (20) .…”

Section: Introductionmentioning

confidence: 99%

The Use of Microchannels for Separation and Preconcentration: Comparison Between Three-Dimensional and Planar Configurations

Lima¹,

Silva

Simões

et al. 2014

RBAV

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Simulation and experimental measurements were used aiming at better understanding flow behavior in planar and three-dimensional microchannels used for separation or preconcentration. Two different microchannels configurations were designed, manufactured in acrylic and the surface was modified to adsorb volatile organic compounds (VOCs). Both channels configuration are 73 cm long, 100 µm wide and 40 µm deep. Simulation was carried out in COMSOL (FEMLAB) 3.2 ® and COSMOS flow 5.0 ® programs, tracer visualization and quartz crystal microbalance data were evaluated according to chromatographic concepts. Due to the higher axial velocity, planar microchannels are more adequate for preconcentration whereas three-dimensional ones show a good performance in the separation process.Keywords: Microchannels; Planar, Three-dimensional, Preconcentration. Resumo Foram usadas simulações computacionais e medidas experimentais com o objetivo de compreender o comportamento de fluidos em microcanais tridimensionais e planares que foram testados na função de separação ou pré-concentração. Duas configurações diferentes foram projetadas, construídas em acrílico e tiveram sua superfície modificada para adsorver compostos orgânicos voláteis (COVs

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Integrated sensors, MEMS, and microsystems: Reflections on a fantastic voyage

Cited by 101 publications

References 70 publications

Force transducers – A review of design and metrological issues

Force transducers – A review of design and metrological issues

Integrated Magnetic MEMS Relays: Status of the Technology

The Use of Microchannels for Separation and Preconcentration: Comparison Between Three-Dimensional and Planar Configurations

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