2021
DOI: 10.3390/mi12050483
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Analog Spatial Light Modulators Based on Micromirror Arrays

Abstract: The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years. While originally focusing on applications related to microlithography and therefore mainly for light in the deep ultraviolet range, the range of applications has been expanded since, including applications in the visible and near-infrared range. This paper gives an overview of the devices and their designs, fabrication, and characterization.

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Cited by 5 publications
(2 citation statements)
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“…additive manufacturing [30], optical ablation [107], volumetric [101] and nonlinear imaging [108]. According to recent reports [109][110][111][112], such devices are currently under intensive development and already available to the first users.…”
Section: Micro-electro-mechanical System Based Slmmentioning
confidence: 99%
“…additive manufacturing [30], optical ablation [107], volumetric [101] and nonlinear imaging [108]. According to recent reports [109][110][111][112], such devices are currently under intensive development and already available to the first users.…”
Section: Micro-electro-mechanical System Based Slmmentioning
confidence: 99%
“…However, multiple studies focused on the increase/reduction of reflectivity for a certain direction and the realization of additional driving forces [18][19][20]. Currently, no desirable solution is available to regulate the reflection characteristics of reflective optical surfaces, such as working ranges, luminance gain intervals, and gain values, by using microstructures.…”
Section: Introductionmentioning
confidence: 99%