Analysis and correction of image distortion in MEMS galvanometer scanning confocal system

Miao, 缪新 Xin; Li, Hangfeng; Zhang, 张运海 Yunhai; Wang, 王发民 Famin; Shi, 施辛 Xin

doi:10.3788/irla.24_2020-0206

Cited by 1 publication

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“…For example, fanshaped distortion is resultant when the incident laser light is reflected by a tip-tilt micromirror [27]. A number of correction methods have been developed to deal with fan-shaped distortions, such as numerical modelling [28], grating target calibration [29] and simplified first-order analytical modelling [30]. Co-contribution of multiple distortions degrades imaging quality of CLEs, causing low diagnostic accuracy.…”

Section: Introductionmentioning

confidence: 99%

A MEMS Mirror-Based Confocal Laser Endomicroscope with Image Distortion Correction

et al. 2023

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Scanning MEMS mirrors can extend confocal laser microscopy into endoscopic applications, but the practical use of MEMS mirror-based confocal endomicroscopy is hindered partially by various image distortions such as barrel, fan-shaped and nonlinear distortions. In this work, the nonlinear scanning behaviors of an electrothermal MEMS mirror are analyzed and incorporated into an optical scanning model that takes all these three types of distortions into account. The model generates a 2D spatial mapping that can be applied to correct all of the image distortions in one step without a calibration board. To experimentally validate this method, a confocal laser endomicroscope employing a two-axis scanning electrothermal MEMS micromirror is designed and constructed, and confocal fluorescence images of a patterned micro-structure are obtained with the MEMS endomicroscope. The results show that the overall image distortion is reduced by at least one order of magnitude in the length direction.

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