Analysis and Design of Thermal Double-Cantilever Bimorph Actuators for Rotating-Type Micromirrors

Abstract

This paper reports the design and simulation of thermal double-cantilever bimorph (TDCB) actuators that can be used to drive micromirrors efficiently. A TDCB actuator combines two paralleled bimorph actuators acting in opposite directions for rotational control of micromirrors. Each actuator is structured by nickel and silicon dioxide thin films with an embedded polysilicon line as a heat source. With a size of only 20 μm width and 100 μm length, TDCB actuators result in vertical displacement of 28 μm at 11 volts DC which is a significant improvement, comparing to the conventional thermal bimorph actuators.