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This paper reports the design of a novel twisting-type micromirror actuation system. The actuating mechanism for driving the micromirror combines two paralleled bimorph actuators bending in opposite directions for rotational control of the micromirror. Each actuator is structured by gold and silicon dioxide or nickel and silicon nitride thin films with embedded polysilicon line heaters. With a size of only 15µm in width, 1.3µm in thickness, and 100µm in length, two bimorph actuators can result in a vertical displacement of 25µm at 10 volts dc with the span of 120µm, and thus the micromirror can rotate by angles over 20°, which is a significant improvement, compared to conventional tilting-type micromirrors.

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This paper reports the design and simulation of thermal double-cantilever bimorph (TDCB) actuators that can be used to drive micromirrors efficiently. A TDCB actuator combines two paralleled bimorph actuators acting in opposite directions for rotational control of micromirrors. Each actuator is structured by nickel and silicon dioxide thin films with an embedded polysilicon line as a heat source. With a size of only 20 μm width and 100 μm length, TDCB actuators result in vertical displacement of 28 μm at 11 volts DC which is a significant improvement, comparing to the conventional thermal bimorph actuators.