Analysis and optimization of fabrication of continuous-relief diffractive optical elements

Hessler, T.; Rossi, Markus; Kunz, R.; Gale, M. D.

doi:10.1364/ao.37.004069

Cited by 79 publications

(33 citation statements)

References 19 publications

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“…The diffractive grating fabrication was modeled as a process of direct laser writing on the photoresist by laser beam scanned with interscan distance. The profile is represented as a convolution of ideal grating profile with Gaussian intensity distribution in the beam 16 . The profile depth is proportional to the exposure dose distribution.…”

Section: Us-reliefmentioning

confidence: 99%

Diffractive optical elements: fabrication and application

2014

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We review our recent progress on development of the methods for fabrication of precision binary and as well as highefficiency continuous-relief diffractive optical elements (DOEs) by combining complementary advantages of circular laser writing system (CLWS), direct laser beam writing in thermal and photo-sensitive materials and analog lithography. The main limitation and tolerances of writing methods are identified, and their influence on optical performance of DOEs is investigated. The latest results of fabrication and practical applications of DOEs with more than 200 mm diameter and a minimum feature size of 0.5 micrometer for testing large aspheric surfaces with a Fizeau-type interferometer are presented.

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Section: Us-reliefmentioning

confidence: 99%

Diffractive optical elements: fabrication and application

2014

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“…This unique feature can highly suppress the diffractive element's chromatic dispersion, as compared with a modulo 2π phase-shift diffractive lens, though HDM still has some extent of minus chromatic aberration. Therefore, it has been widely applied in optical system design and integration [10,11] . However, for classical HDMs made of glass, quartz and polymer, etc., the lack of biocompatibility and environmental responsiveness limits their further applications in biophotonics or biomedical optics, etc.…”

Section: Protein Tunable Harmonic Diffractive Relief Microlenses [3]mentioning

confidence: 99%

Protein 'smart' micro/nano-biooptics via femtosecond laser direct writing

2013

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Protein-hydrogel-based free-form three-dimensional (3D) micro/nano-elements with ''smart'' stimuli-responsiveness fabricated via femtosecond laser direct writing (FsLDW) have attracted increasing efforts for their wide utilities in many fields, such as bio-micro/nano-machine [1] , biophotonics [2,3] , etc. All processes of this protein-FsLDW are carried out in proteins' aqueous solutions, as a result of which the approach is noncontact, maskless and biocompatible. So, we applied the promising FsLDW approach, which, in the construction of protein-based 3D optical microdevices, for example, microlenses. In order to meet the requirements of optical applications, FsLDW system and processing parameters were carefully optimized to achieve high-quality surface and 3D morphology. The photo-crosslinked protein microhydrogels showed a rapid and reversible swell-to-shrink behavior once stimulated by chemical signals, by which the protein microdevices can be dynamically tuned. Because of using protein molecules as "building blocks", protein-based microelements were demonstrated of good biocompatibility. Based on the valuable and unique merits, protein-based optical micro/nano-elements have great potential for micro/nano-bio-optics, bionics, and novel biomedical applications, etc.

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“…As design freedom in the transmission design the phase of the signal ® eld is used. The height of the pro® le is about 200 m m. Though the fabrication of such a pro® le is not yet a standard problem, new technologies to fabricate deep pro® les are under current consideration and will be available in the future [27,28].…”

Section: Design Of a Non-paraxial Gaussian-to-tophat Beam Shaping Elementioning

confidence: 99%

Wave-optical structure design with the local plane-interface approximation

Pfeil

Wyrowski

2000

Journal of Modern Optics

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The design of an optical element profile with specified transmission function for a given incident wave is of fundamental concern in optical design. A well-known example is the design of an aspherical surface in order to realize a spherical phase-only transmission. Various wave-optical system design methods lead to transmission functions as a first step. Then, often the thin-element approximation is applied in a second step to obtain an element structure with the desired transmission. However, if the refraction at the optical interface cannot be neglected, the thin-element approximation is not valid. In this case, a higher version of the local plane-interface approximation can be used for the element structure design. An algorithm for this model is introduced and its characteristics are discussed for the example of a non-paraxial Gaussian-to-tophat beam shaping element

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Analysis and optimization of fabrication of continuous-relief diffractive optical elements

Cited by 79 publications

References 19 publications

Diffractive optical elements: fabrication and application

Diffractive optical elements: fabrication and application

Protein 'smart' micro/nano-biooptics via femtosecond laser direct writing

Wave-optical structure design with the local plane-interface approximation

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