A precision laser pattern generator for writing arbitrary diffractive elements was developed as an alternative to Cartesian coordinate laser/electron-beam writers. This system allows for the fabrication of concentric continuous-relief and arbitrary binary patterns with minimum feature sizes of less than 0.6 microm and position accuracy of 0.1 microm over 300-mm substrates. Two resistless technologies of writing on chromium and on amorphous silicon films were developed and implemented. We investigated limit characteristics by writing special test structures. A 58-mm f/1.1 zone plate written directly is demonstrated at a lambda/50 rms wave-front error corresponding to a 0.06-microm pattern accuracy. Several examples of fabricated diffractive elements are presented.
Unique hierarchical laser-induced periodic surface structures (LIPSSs) enable the detection of metal ions at sub-nM concentrations via surface-enhanced fluorescence.
In this paper, we present the results of thermochemical LIPSS formation on a chromium film with a thickness in the range of 28-350 nm induced by femtosecond laser radiation (λ = 1026 nm, ν = 200 kHz, τ = 232 fs). The period, height, morphology and chemical composition of TLIPSS as a function of the metal film thickness and focusing configuration are investigated. The growth of TLIPSS period from 678 nm to 950 nm with increasing thickness of the film has been explained by a formation of oxides with different stoichiometry composition. So, the CrO oxide prevails in the composition for the case of TLIPSS formed on thin films which have the minimal period, whereas CrO oxide is dominant in the case of TLIPSS formed on thick chromium films which have the maximal period value. The results obtained are in agreement with numerical modeling of a period defined by the interference between an incident radiation and a scattered one from a single oxide ridge with a different chemical composition.
Thin Cr films 28-nm thick deposited on glass substrates were processed by scanning low-intensity femtosecond laser pulses with energy well below single-pulse damage threshold.Two types of laser-induced periodic surface structures (LIPSS) were produced, depending on the scanning velocity, (1) parallel to laser light polarization with periodicity somewhat smaller than laser wavelength and (2) perpendicular to polarization with spatial period much smaller than wavelength. All structures are formed as protrusions above the initial film surface and exhibit a high degree of oxidation. To explain formation of the LIPSS and their conversion from one to another type, a rigorous numerical approach for modeling surface electromagnetic waves in thin-film geometry has been developed, which takes into account the change of optical properties of material due to laser-induced oxidation and porosity. The approach addresses the multiplicity of electromagnetic modes allowed for thin films. It has been found that the low spatial frequency LIPSS parallel to laser polarization, which are formed at low scanning 2 velocities, are well described by the Sipe theory for surfaces of low roughness. The SEW mode responsible for high spatial frequency LIPSS formation at high scanning velocities has been identified. The mechanisms of optical feedback and transformation between types of LIPSS with scanning velocity have been proposed.3
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