Analysis and simulation of round gimbaled electrostatic torsion micro-mirror

Bahgat, Ahmed S.; Zaki, Ahmed H.; Abdo, Mohamed; El-Sherif, Ashraf F.

doi:10.1109/icces.2017.8275397

Cited by 2 publications

(2 citation statements)

References 11 publications

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“…The critical tilting angle without the influence of thermal Casimir force calculated by the FEM simulation is about 0.4610, which is about 4.3% different from the theory result in this paper. While the error in reference 73 is 4.7%. After considering the thermal Casimir force as Guo and Zhao, 74 the relationship of the critical tilting angle and non-dimensional gap calculated by the FEM simulation is still similar to the result in this paper.…”

Section: Resultsmentioning

confidence: 88%

Coupled effects of surface interaction and damping on electromechanical stability of functionally graded nanotubes reinforced torsional micromirror actuator

Yang

Liu

Ying³

et al. 2021

The Journal of Strain Analysis for Engineering Design

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This paper demonstrated the coupled surface effects of thermal Casimir force and squeeze film damping (SFD) on size-dependent electromechanical stability and bifurcation of torsion micromirror actuator. The governing equations of micromirror system are derived, and the pull-in voltage and critical tilting angle are obtained. Also, the twisting deformation of torsion nanobeam can be tuned by functionally graded carbon nanotubes reinforced composites (FG-CNTRC). A finite element analysis (FEA) model is established on the COMSOL Multiphysics platform, and the simulation of the effect of thermal Casimir force on pull-in instability is utilized to verify the present analytical model. The results indicate that the numerical results well agree with the theoretical results in this work and experimental data in the literature. Further, the influences of volume fraction and geometrical distribution of CNTs, thermal Casimir force, nonlocal parameter, and squeeze film damping on electrically actuated instability and free-standing behavior are detailedly discussed. Besides, the evolution of equilibrium states of micromirror system is investigated, and bifurcation diagrams and phase portraits including the periodic, homoclinic, and heteroclinic orbits are described as well. The results demonstrated that the amplitude of the tilting angle for FGX-CNTRC type micromirror attenuates slower than for FGO-CNTRC type, and the increment of CNTs volume ratio slows down the attenuation due to the stiffening effect. When considering squeeze film damping, the stable center point evolves into one focus point with homoclinic orbits, and the dynamic system maintains two unstable saddle points with the heteroclinic orbits due to the effect of thermal Casimir force.

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Section: Resultsmentioning

confidence: 88%

Coupled effects of surface interaction and damping on electromechanical stability of functionally graded nanotubes reinforced torsional micromirror actuator

Yang

Liu

Ying³

et al. 2021

The Journal of Strain Analysis for Engineering Design

View full text Add to dashboard Cite

show abstract

“…In order to generate ideal illumination modes, mirrors are actuated in a sufficient angle range of 2° with a angular error of less than 0.002°. Furthermore, the driving methods of micromirrors mainly include electrostatic actuation, electromagnetic actuation, electrothermal actuation, and piezoelectric actuation [8][9][10][11][12] . Due to the requirement of high integration level, high response speed, and high duty ratio for MMA in illumination system, the design of micro mirror is based on electrostatic driving method.…”

Section: Introductionmentioning

confidence: 99%